Panchal Vishal, Yang Yanfei, Cheng Guangjun, Hu Jiuning, Kruskopf Mattias, Liu Chieh-I, Rigosi Albert F, Melios Christos, Hight Walker Angela R, Newell David B, Kazakova Olga, Elmquist Randolph E
National Physical Laboratory, Hampton Road, Teddington TW11 0LW, UK.
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
Commun Phys. 2018;1. doi: 10.1038/s42005-018-0084-6.
Two-dimensional (2D) materials such as graphene have become the focus of extensive research efforts in condensed matter physics. They provide opportunities for both fundamental research and applications across a wide range of industries. Ideally, characterization of graphene requires non-invasive techniques with single-atomic-layer thickness resolution and nanometer lateral resolution. Moreover, commercial application of graphene requires fast and large-area scanning capability. We demonstrate the optimized balance of image resolution and acquisition time of non-invasive confocal laser scanning microscopy (CLSM), rendering it an indispensable tool for rapid analysis of mass-produced graphene. It is powerful for analysis of 1-5 layers of exfoliated graphene on Si/SiO, and allows us to distinguish the interfacial layer and 1-3 layers of epitaxial graphene on SiC substrates. Furthermore, CLSM shows excellent correlation with conventional optical microscopy, atomic force microscopy, Kelvin probe force microscopy, conductive atomic force microscopy, scanning electron microscopy and Raman mapping.
诸如石墨烯之类的二维（2D）材料已成为凝聚态物理领域广泛研究的焦点。它们为基础研究和跨行业应用都提供了机会。理想情况下，对石墨烯进行表征需要具有单原子层厚度分辨率和纳米级横向分辨率的非侵入性技术。此外，石墨烯的商业应用需要快速且大面积的扫描能力。我们展示了非侵入式共聚焦激光扫描显微镜（CLSM）在图像分辨率和采集时间方面的优化平衡，使其成为快速分析大规模生产的石墨烯不可或缺的工具。它对于分析硅/二氧化硅上1 - 5层的剥离石墨烯很强大，并且使我们能够区分碳化硅衬底上的界面层和1 - 3层外延石墨烯。此外，CLSM与传统光学显微镜、原子力显微镜、开尔文探针力显微镜、导电原子力显微镜、扫描电子显微镜和拉曼映射显示出极好的相关性。
