Zhang Man, Xia Liangping, Dang Suihu, Cao Axiu, Shi Lifang, Pang Hui, Du Chunlei
School of Electronic Information Engineering, Yangtze Normal University, Chongqing, 408100, China.
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China.
Nanoscale Res Lett. 2019 Jul 11;14(1):230. doi: 10.1186/s11671-019-3071-2.
In this study, double-sided polymer surface nanostructures are fabricated using twice nanoimprint lithography and metal deposition technique. We perform electrical property measurement on these double-sided surface nanostructures. Open-circuit voltage and short-circuit current of the as-prepared samples with double-sided surface nanostructures and conductive electrode are recorded using an oscilloscope with applying different external force. The measurements are carried out at room temperature. We find that the intensity of open-circuit voltage and short-circuit current for the double-sided surface nanostructures depends strongly on the sizes, shapes, and arrangements of nanostructures and pressure force. The strongest electrical property can be observed in the hexagon nanopillar arrays with the diameter of about 400 nm containing sub-50-nm resolution sharp structures at the force of about 40 N. We discuss the physical mechanisms responsible for these interesting research findings. The experimental results we study are relevant to the applications of double-sided surface nanostructures such as a nanogenerator, pressure sensors, and nano-optoelectronic devices.
在本研究中，采用两次纳米压印光刻和金属沉积技术制备了双面聚合物表面纳米结构。我们对这些双面表面纳米结构进行了电学性能测量。使用示波器在施加不同外力的情况下，记录了具有双面表面纳米结构和导电电极的制备样品的开路电压和短路电流。测量在室温下进行。我们发现，双面表面纳米结构的开路电压和短路电流强度强烈依赖于纳米结构的尺寸、形状、排列以及压力。在直径约400nm、包含分辨率低于50nm的尖锐结构的六边形纳米柱阵列中，在约40N的力作用下可观察到最强的电学性能。我们讨论了导致这些有趣研究结果的物理机制。我们所研究的实验结果与双面表面纳米结构在纳米发电机、压力传感器和纳米光电器件等方面的应用相关。
