Engineering Research Center of IoT Technology Applications (Ministry of CEducation), Department of Electronic Engineering, Jiangnan University, Wuxi 214122, China.
Institute of Future Environments and School of Chemistry, Physics and Mechanical Engineering, Queensland University of Technology, Brisbane, QLD 4000, Australia.
Nanoscale. 2019 Nov 7;11(41):19202-19213. doi: 10.1039/c9nr05522c. Epub 2019 Aug 22.
Two-dimensional (2D) transition metal dichalcogenide (TMDC) materials have recently attracted great interest because of their tantalising prospects for a broad range of applications including electronics, optoelectronics, and energy storage. Unlike bulk materials, the device performance of atomically thin 2D materials is determined by the interface, thickness and defects. Plasma processing is very effective for diverse modifications of nanoscale 2D TMDC materials, owing to its uniquely controllable, effective processes and energy efficiency. Herein, we critically discuss selected recent advances in plasma modification of 2D TMDC materials and their optical and electronic (including optoelectronic) properties of relevance to applications in hydrogen production, gas sensing and energy storage devices. Challenges and future research opportunities in the relevant research field are presented. This review contributes to directing future advances of plasma processing of TMDC materials for targeted applications.
二维（2D）过渡金属二卤化物（TMDC）材料由于在电子、光电和能量存储等广泛应用领域的诱人前景而引起了极大的关注。与体材料不同，原子层厚的 2D 材料的器件性能取决于界面、厚度和缺陷。等离子体处理由于其独特的可控、高效的工艺和能源效率，非常适合纳米级 2D TMDC 材料的各种改性。在此，我们批判性地讨论了等离子体改性 2D TMDC 材料及其与应用于制氢、气体传感和能量存储器件相关的光学和电子（包括光电）性能的最新进展。提出了相关研究领域的挑战和未来研究机会。本综述有助于指导 TMDC 材料的等离子体处理在有针对性应用中的未来发展。
