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基于二维材料的用于柔性应用的III族氮化物半导体的范德华外延

Van der Waals Epitaxy of III-Nitride Semiconductors Based on 2D Materials for Flexible Applications.

作者信息

Yu Jiadong, Wang Lai, Hao Zhibiao, Luo Yi, Sun Changzheng, Wang Jian, Han Yanjun, Xiong Bing, Li Hongtao

机构信息

Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing, 100084, China.

Flexible Intelligent Optoelectronic Device and Technology Center, Institute of Flexible Electronics Technology of THU, Zhejiang, Jiaxing, 314006, China.

出版信息

Adv Mater. 2020 Apr;32(15):e1903407. doi: 10.1002/adma.201903407. Epub 2019 Sep 5.

DOI:10.1002/adma.201903407
PMID:31486182
Abstract

III-nitride semiconductors have attracted considerable attention in recent years owing to their excellent physical properties and wide applications in solid-state lighting, flat-panel displays, and solar energy and power electronics. Generally, GaN-based devices are heteroepitaxially grown on c-plane sapphire, Si (111), or 6H-SiC substrates. However, it is very difficult to release the GaN-based films from such single-crystalline substrates and transfer them onto other foreign substrates. Consequently, it is difficult to meet the ever-increasing demand for wearable and foldable applications. On the other hand, sp -bonded two-dimensional (2D) materials, which exhibit hexagonal in-plane lattice arrangements and weakly bonded layers, can be transferred onto flexible substrates with ease. Hence, flexible III-nitride devices can be implemented through such 2D release layers. In this progress report, the recent advances in the different strategies for the growth of III-nitrides based on 2D materials are reviewed, with a focus on van der Waals epitaxy and transfer printing. Various attempts are presented and discussed herein, including the different kinds of 2D materials (graphene, hexagonal boron nitride, and transition metal dichalcogenides) used as release layers. Finally, current challenges and future perspectives regarding the development of flexible III-nitride devices are discussed.

摘要

近年来,III族氮化物半导体因其优异的物理性能以及在固态照明、平板显示器、太阳能和电力电子领域的广泛应用而备受关注。一般来说,基于氮化镓的器件是在c面蓝宝石、硅(111)或6H-碳化硅衬底上异质外延生长的。然而,要从这种单晶衬底上释放基于氮化镓的薄膜并将其转移到其他外来衬底上非常困难。因此,很难满足对可穿戴和可折叠应用不断增长的需求。另一方面,具有六边形面内晶格排列和弱键合层的sp键合二维(2D)材料可以轻松转移到柔性衬底上。因此,可以通过这种二维释放层实现柔性III族氮化物器件。在本进展报告中,回顾了基于二维材料生长III族氮化物的不同策略的最新进展,重点是范德华外延和转移印刷。本文介绍并讨论了各种尝试,包括用作释放层的不同种类的二维材料(石墨烯、六方氮化硼和过渡金属二硫属化物)。最后,讨论了柔性III族氮化物器件发展目前面临的挑战和未来前景。

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