Mehrabi Pouria, Hui Justin, Janfaza Sajjad, O'Brien Allen, Tasnim Nishat, Najjaran Homayoun, Hoorfar Mina
School of Engineering, University of British Columbia, Kelowna, BC V1V 1V7, Canada.
Micromachines (Basel). 2020 Feb 12;11(2):190. doi: 10.3390/mi11020190.
This paper presents the development of a metal oxide semiconductor (MOS) sensor for the detection of volatile organic compounds (VOCs) which are of great importance in many applications involving either control of hazardous chemicals or noninvasive diagnosis. In this study, the sensor is fabricated based on tin dioxide (SnO) and poly(ethylene oxide) (PEO) using electrospinning. The sensitivity of the proposed sensor is further improved by calcination and gold doping. The gold doping of composite nanofibers is achieved using sputtering, and the calcination is performed using a high-temperature oven. The performance of the sensor with different doping thicknesses and different calcination temperatures is investigated to identify the optimum fabrication parameters resulting in high sensitivity. The optimum calcination temperature and duration are found to be 350 °C and 4 h, respectively and the optimum thickness of the gold dopant is found to be 10 nm. The sensor with the optimum fabrication process is then embedded in a microchannel coated with several metallic and polymeric layers. The performance of the sensor is compared with that of a commercial sensor. The comparison is performed for methanol and a mixture of methanol and tetrahydrocannabinol (THC) which is the primary psychoactive constituent of cannabis. It is shown that the proposed sensor outperforms the commercial sensor when it is embedded inside the channel.
本文介绍了一种用于检测挥发性有机化合物（VOC）的金属氧化物半导体（MOS）传感器的研发情况。挥发性有机化合物在许多涉及危险化学品控制或无创诊断的应用中非常重要。在本研究中，该传感器基于二氧化锡（SnO）和聚环氧乙烷（PEO）通过静电纺丝法制备而成。通过煅烧和金掺杂进一步提高了所提出传感器的灵敏度。复合纳米纤维的金掺杂通过溅射实现，煅烧则使用高温炉进行。研究了具有不同掺杂厚度和不同煅烧温度的传感器的性能，以确定能实现高灵敏度的最佳制造参数。发现最佳煅烧温度和持续时间分别为350℃和4小时，金掺杂剂的最佳厚度为10纳米。然后将具有最佳制造工艺的传感器嵌入涂有几层金属和聚合物层的微通道中。将该传感器的性能与商用传感器的性能进行了比较。针对甲醇以及甲醇和四氢大麻酚（THC，大麻的主要精神活性成分）的混合物进行了比较。结果表明，当所提出的传感器嵌入通道内时，其性能优于商用传感器。
