Thin Film Nano Technology Laboratory, Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa First Road, Kwei-Shan, Tao-Yuan, 33302, Taiwan.
Department of Obstetrics and Gynecology, Keelung Chang Gung Memorial Hospital, No. 222, Maijin Road, Anle, Keelung, 204, Taiwan.
Anal Chem. 2020 Jun 16;92(12):8064-8071. doi: 10.1021/acs.analchem.9b04745. Epub 2020 May 28.
Sarcosine prostate cancer biomarker with the low concentration of 1 pM has been detected by controlling oxygen from 1 to 15 sccm in a NiO membrane on chemically etched vertical Si nanowires (SiNWs) in an electrolyte-insulator-nanowire (EIN) structure. The vertical Si nanowires with approximately 17 μm length and polycrystalline NiO membrane are observed by both field-emission scanning electron microscope (FE-SEM) and high-resolution transmission electron microscope (HRTEM) images, respectively. The optimized NiO membrane with oxygen content of 4 sccm on planar SiO/Si substrate shows good pH sensitivity of approximately 50 mV/pH, low hysteresis of 3.4 mV, and low drift rate of 2.4 mV/h as compared to other oxygen content membranes of 1, 10, and 15 sccm. Further, uric acid with the concentration of 0.1 μM is detected directly by using the optimized NiO membrane. In addition, repeatable HO sensing with the low concentration of 10 pM as well as prostate cancer biomarker is detected, which is owing to the reduction-oxidation phenomena of the NiO membranes. The sensing mechanism is owing to the Ni/Ni oxidation states of the NiO membrane, which is confirmed by X-ray photoelectron spectroscopy. The optimized NiO membrane on vertical Si nanowire in the EIN structure shows a good drift rate of 3.84 mV/h and sarcosine detection with improvement of approximately 1000 times as compared to the planar Si in an electrolyte-insulator-semiconductor (EIS) structure. This sensor paves a way to detect early-stage diagnosis of prostate cancer rapidly in the near future.
通过在化学刻蚀的垂直硅纳米线（SiNWs）上的 NiO 膜中控制氧流量从 1 到 15 sccm，检测到具有 1 pM 低浓度的肌氨酸前列腺癌生物标志物。通过场发射扫描电子显微镜（FE-SEM）和高分辨率透射电子显微镜（HRTEM）图像分别观察到长度约为 17 μm 的垂直 Si 纳米线和多晶 NiO 膜。在平面 SiO2/Si 衬底上，优化的氧流量为 4 sccm 的 NiO 膜表现出良好的 pH 灵敏度，约为 50 mV/pH，低滞后性为 3.4 mV，漂移率低至 2.4 mV/h，而其他氧流量为 1、10 和 15 sccm 的膜则较差。此外，还可以直接检测浓度为 0.1 μM 的尿酸。此外，通过使用优化的 NiO 膜，还可以检测到重复的低浓度 10 pM 的 HO 传感和前列腺癌生物标志物，这归因于 NiO 膜的还原-氧化现象。传感机制归因于 NiO 膜的 Ni/Ni 氧化态，这通过 X 射线光电子能谱得到证实。在 EIN 结构中，垂直 Si 纳米线的优化 NiO 膜表现出良好的漂移率 3.84 mV/h 和肌氨酸检测，与平面 Si 在电解质-绝缘体-半导体（EIS）结构中的检测相比，改善了约 1000 倍。该传感器为未来快速检测前列腺癌的早期诊断铺平了道路。
