Xu Pengfei, Wang Dazhi, He Jianqiao, Cui Yichang, Lu Liangkun, Li Yikang, Chen Xiangji, Liu Chang, Suo Liujia, Ren Tongqun, Wang Tiesheng, Cui Yan
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, 116024, China.
State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian, 116024, China.
Nat Commun. 2024 May 31;15(1):4651. doi: 10.1038/s41467-024-49145-9.
Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 μg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements.
纳米机电系统加速度计因其低成本、小尺寸和低功耗，有潜力应用于下一代消费电子产品、惯性导航和地震学领域。迫切需要开发具有高灵敏度、高精度和高鲁棒性的谐振式加速度计。在此，利用氧化锌纳米线设计并制作了一种具有高灵敏度的氧化锌谐振纳米加速度计。在一个器件中，两根纳米线对称地放置在靠近带缺口的挠曲处，以基于差分谐振频率评估加速度。此外，在加速度计中集成了微杠杆，通过放大惯性力来提高其灵敏度。分别通过测量得到的绝对灵敏度（16.818 kHz/g）、偏置不稳定性（在1.2 s积分时间下为13.13 μg）和带宽（从4.78到29.64 kHz）证明了该加速度计的高性能。这些结果表明，氧化锌纳米线可能是开发未来纳米机电谐振加速度计的候选材料，该加速度计可能用于惯性导航、倾斜测量和地球物理测量。
