Liu Qiling, Liu Bingyan, Kou Jiehao, Zhang Yueqi, Feng Jicheng
School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Shanghai, 201210, China.
Nano Lett. 2025 Aug 6;25(31):12035-12041. doi: 10.1021/acs.nanolett.5c02951. Epub 2025 Jul 29.
Plasmonic nanoantennas enable unprecedented control of light-matter interactions at subwavelength scales, yet conventional fabrication methods limit designs to planar geometries with fixed resonant properties. Here, we demonstrate 3D-printed plasmonic nanoantenna arrays featuring record aspect ratios (15:1), miniaturized features (∼40 nm), and high density (1.0 × 10 mm) on silicon wafers. Our approach enables the single-step fabrication of vertically standing multimaterial nanoantennas with unified dimensional control, thereby overcoming challenges in 3D plasmonic integration. By engineering material composition and layer arrangement in hybrid architectures, one can tune localized surface plasmon resonances across the visible spectrum, while polarization-selective responses enable multifunctional operation. These 3D-printed nanoantennas eliminate parasitic substrate losses inherent to planar designs and exhibit broadband operation through complementary plasmonic modes. The combined capabilities of high-density integration, spectral tunability, and out-of-plane control position this platform as a practical tool in photodetection, solar-energy devices, and on-chip nanophotonics.
等离子体纳米天线能够在亚波长尺度上以前所未有的方式控制光与物质的相互作用,然而传统制造方法将设计限制在具有固定谐振特性的平面几何结构上。在此,我们展示了在硅片上3D打印的等离子体纳米天线阵列,其具有创纪录的纵横比(15:1)、小型化特征(约40纳米)和高密度(1.0×10毫米)。我们的方法能够一步制造出具有统一尺寸控制的垂直站立的多材料纳米天线,从而克服了3D等离子体集成中的挑战。通过在混合结构中设计材料成分和层排列,可以在可见光谱范围内调节局域表面等离子体共振,同时偏振选择性响应实现多功能操作。这些3D打印的纳米天线消除了平面设计中固有的寄生衬底损耗,并通过互补等离子体模式实现宽带操作。高密度集成、光谱可调性和面外控制的综合能力使该平台成为光探测、太阳能设备和片上纳米光子学中的实用工具。