Wang Yina, Zhang Lei, Yang Wen, Lv Shanshan, Su Chenhui, Xiao Hang, Zhang Faye, Sui Qingmei, Jia Lei, Jiang Mingshun
School of Control Science and Engineering, Shandong University, Jingshi Road, Jinan 250061, China.
Materials (Basel). 2020 Dec 18;13(24):5794. doi: 10.3390/ma13245794.
In this work, we demonstrate the application of differential reflectance spectroscopy (DRS) to monitor the growth of molybdenum disulfide (MoS) using chemical vapor deposition (CVD). The growth process, optical properties, and structure evolution of MoS were recorded by in-situ DRS. Indeed, blue shifts of the characteristic peak B were discussed with the decrease of temperature. We also obtained the imaginary part of the MoS dielectric constant according to reflectance spectra. This method provides an approach for studying the change of two-dimensional (2D) materials' dielectric constant with temperature. More importantly, our work emphasizes that the DRS technique is a non-destructive and effective method for in-situ monitoring the growth of 2D materials, which is helpful in guiding the preparation of 2D materials.
在这项工作中，我们展示了差分反射光谱（DRS）在使用化学气相沉积（CVD）监测二硫化钼（MoS）生长方面的应用。通过原位DRS记录了MoS的生长过程、光学性质和结构演变。实际上，随着温度降低，对特征峰B的蓝移进行了讨论。我们还根据反射光谱获得了MoS介电常数的虚部。该方法为研究二维（2D）材料介电常数随温度的变化提供了一种途径。更重要的是，我们的工作强调DRS技术是一种用于原位监测2D材料生长的无损且有效的方法，这有助于指导2D材料的制备。
