Wang Yina, Zhang Lei, Su Chenhui, Xiao Hang, Lv Shanshan, Zhang Faye, Sui Qingmei, Jia Lei, Jiang Mingshun
School of Control Science and Engineering, Shandong University, Jinan 250061, China.
Institute of Marine Science and Technology, Shandong University, Qingdao 266237, China.
Nanomaterials (Basel). 2019 Nov 19;9(11):1640. doi: 10.3390/nano9111640.
The in-situ observation is of great significance to the study of the growth mechanism and controllability of two-dimensional transition metal dichalcogenides (TMDCs). Here, the differential reflectance spectroscopy (DRS) was performed to monitor the growth of molybdenum disulfide (MoS) on a SiO/Si substrate prepared by chemical vapor deposition (CVD). A home-built in-situ DRS setup was applied to monitor the growth of MoS in-situ. The formation and evolution of monolayer MoS are revealed by differential reflectance (DR) spectra. The morphology, vibration mode, absorption characteristics and thickness of monolayer MoS have been confirmed by optical microscopy, Raman spectroscopy, ex-situ DR spectra, and atomic force microscopy (AFM) respectively. The results demonstrated that DRS was a powerful tool for in-situ observations and has great potential for growth mechanism and controllability of TMDCs prepared by CVD. To the best of the authors' knowledge, it was the first report in which the CVD growth of two-dimensional TMDCs has been investigated in-situ by reflectance spectroscopy.
原位观察对于研究二维过渡金属二硫属化物（TMDCs）的生长机制和可控性具有重要意义。在此，采用差分反射光谱（DRS）来监测通过化学气相沉积（CVD）在SiO/Si衬底上生长二硫化钼（MoS）的过程。利用自行搭建的原位DRS装置对MoS的生长进行原位监测。通过差分反射（DR）光谱揭示了单层MoS的形成和演化过程。分别通过光学显微镜、拉曼光谱、非原位DR光谱和原子力显微镜（AFM）对单层MoS的形貌、振动模式、吸收特性和厚度进行了确认。结果表明，DRS是一种用于原位观察的强大工具，对于通过CVD制备的TMDCs的生长机制和可控性具有巨大潜力。据作者所知，这是首次通过反射光谱对二维TMDCs的CVD生长进行原位研究的报道。
