• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

微尺度金属特征的电解抛光与成型

Electropolishing and Shaping of Micro-Scale Metallic Features.

作者信息

Zaki Sana, Zhang Nan, Gilchrist Michael D

机构信息

Center of Micro/Nano Manufacturing Technology (MNMT-Dublin), School of Mechanical & Materials Engineering, University College Dublin, Belfield, D04 V1W8 Dublin, Ireland.

出版信息

Micromachines (Basel). 2022 Mar 18;13(3):468. doi: 10.3390/mi13030468.

DOI:10.3390/mi13030468
PMID:35334760
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8955333/
Abstract

Electropolishing (EP) is most widely used as a metal finishing process. It is a non-contact electrochemical process that can clean, passivate, deburr, brighten, and improve the biocompatibility of surfaces. However, there is clear potential for it to be used to shape and form the topology of micro-scale surface features, such as those found on the micro-applications of additively manufactured (AM) parts, transmission electron microscopy (TEM) samples, micro-electromechanical systems (MEMs), biomedical stents, and artificial implants. This review focuses on the fundamental principles of electrochemical polishing, the associated process parameters (voltage, current density, electrolytes, electrode gap, and time), and the increasing demand for using environmentally sustainable electrolytes and micro-scale applications. A summary of other micro-fabrication processes, including micro-milling, micro-electric discharge machining (EDM), laser polishing/ablation, lithography (LIGA), electrochemical etching (MacEtch), and reactive ion etching (RIE), are discussed and compared with EP. However, those processes have tool size, stress, wear, and structural integrity limitations for micro-structures. Hence, electropolishing offers two-fold benefits of material removal from the metal, resulting in a smooth and bright surface, along with the ability to shape/form micro-scale features, which makes the process particularly attractive for precision engineering applications.zx3.

摘要

电解抛光（EP）作为一种金属表面处理工艺应用最为广泛。它是一种非接触式电化学工艺，可清洁、钝化、去毛刺、提亮并改善表面的生物相容性。然而，它显然有潜力用于塑造和形成微观尺度表面特征的拓扑结构，比如在增材制造（AM）零件的微应用、透射电子显微镜（TEM）样品、微机电系统（MEMS）、生物医学支架和人工植入物上发现的那些特征。本综述聚焦于电化学抛光的基本原理、相关工艺参数（电压、电流密度、电解质、电极间隙和时间），以及对使用环境可持续电解质和微观尺度应用的需求不断增加的情况。还讨论了其他微加工工艺的概述，包括微铣削、微电火花加工（EDM）、激光抛光/烧蚀、光刻（LIGA）、电化学蚀刻（MacEtch）和反应离子蚀刻（RIE），并将它们与电解抛光进行了比较。然而，那些工艺对于微结构存在刀具尺寸、应力、磨损和结构完整性方面的限制。因此，电解抛光具有双重益处，既能从金属上去除材料，得到光滑明亮的表面，又具备塑造/形成微观尺度特征的能力，这使得该工艺对精密工程应用特别有吸引力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/03f04dfa0058/micromachines-13-00468-g024.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/805eef8bc684/micromachines-13-00468-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/bab12086c920/micromachines-13-00468-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/cb9382209a4e/micromachines-13-00468-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/a799fbb2966f/micromachines-13-00468-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/d797d7c01912/micromachines-13-00468-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/1ea79d6c2d22/micromachines-13-00468-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/f3d93a332ef7/micromachines-13-00468-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/b8c34be08732/micromachines-13-00468-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/c87c265d7ea7/micromachines-13-00468-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/60183e642fc3/micromachines-13-00468-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/9dd38c032b1a/micromachines-13-00468-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/2f26dce2a0b6/micromachines-13-00468-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/e8088ce8bf68/micromachines-13-00468-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/37b2d685d1e6/micromachines-13-00468-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/796faf29fb9c/micromachines-13-00468-g015a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/aeb998678ebd/micromachines-13-00468-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/f8cf780174c4/micromachines-13-00468-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/171a468e91b9/micromachines-13-00468-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/ab26263b4e47/micromachines-13-00468-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/614d9a5c7663/micromachines-13-00468-g020a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/a50fcf1c31bb/micromachines-13-00468-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/6b76ed933c75/micromachines-13-00468-g022.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/17a76b16f398/micromachines-13-00468-g023.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/03f04dfa0058/micromachines-13-00468-g024.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/805eef8bc684/micromachines-13-00468-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/bab12086c920/micromachines-13-00468-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/cb9382209a4e/micromachines-13-00468-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/a799fbb2966f/micromachines-13-00468-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/d797d7c01912/micromachines-13-00468-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/1ea79d6c2d22/micromachines-13-00468-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/f3d93a332ef7/micromachines-13-00468-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/b8c34be08732/micromachines-13-00468-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/c87c265d7ea7/micromachines-13-00468-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/60183e642fc3/micromachines-13-00468-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/9dd38c032b1a/micromachines-13-00468-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/2f26dce2a0b6/micromachines-13-00468-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/e8088ce8bf68/micromachines-13-00468-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/37b2d685d1e6/micromachines-13-00468-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/796faf29fb9c/micromachines-13-00468-g015a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/aeb998678ebd/micromachines-13-00468-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/f8cf780174c4/micromachines-13-00468-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/171a468e91b9/micromachines-13-00468-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/ab26263b4e47/micromachines-13-00468-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/614d9a5c7663/micromachines-13-00468-g020a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/a50fcf1c31bb/micromachines-13-00468-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/6b76ed933c75/micromachines-13-00468-g022.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/17a76b16f398/micromachines-13-00468-g023.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8caf/8955333/03f04dfa0058/micromachines-13-00468-g024.jpg

相似文献

1
Electropolishing and Shaping of Micro-Scale Metallic Features.微尺度金属特征的电解抛光与成型
Micromachines (Basel). 2022 Mar 18;13(3):468. doi: 10.3390/mi13030468.
2
Confined Chemical Etching for Electrochemical Machining with Nanoscale Accuracy.限制化学刻蚀实现纳米级精度的电化学加工。
Acc Chem Res. 2016 Nov 15;49(11):2596-2604. doi: 10.1021/acs.accounts.6b00336. Epub 2016 Sep 26.
3
Micro Electrochemical Milling of Micro Metal Parts with Rotating Ultrasonic Electrode.基于旋转超声电极的微金属零件微电化学铣削加工
Sensors (Basel). 2020 Nov 19;20(22):6617. doi: 10.3390/s20226617.
4
Optimization of forward pulsed currents for combining the precision shaping and polishing of nickel micro mould tools to reduce demoulding defects.优化正向脉冲电流以结合镍微模具的精密成型和抛光，减少脱模缺陷。
Int J Adv Manuf Technol. 2024;131(7-8):3631-3649. doi: 10.1007/s00170-024-13163-0. Epub 2024 Feb 19.
5
Experimental Investigation on Rotating Electrochemical Etching of a Micro Spiral Cylindrical Electrode.微螺旋圆柱电极旋转电化学蚀刻的实验研究
Micromachines (Basel). 2019 Oct 16;10(10):704. doi: 10.3390/mi10100704.
6
Using the Ethaline Electropolishing Method on the Internal Surface of Additive Manufactured Tubes.在增材制造管材内表面使用埃塔林电解抛光法。
Materials (Basel). 2024 Oct 8;17(19):4915. doi: 10.3390/ma17194915.
7
Effect of Conductive Coatings on Micro-Electro-Discharge Machinability of Aluminum Nitride Ceramic Using On-Machine-Fabricated Microelectrodes.导电涂层对使用机上制造的微电极加工氮化铝陶瓷微放电加工性能的影响。
Materials (Basel). 2019 Oct 11;12(20):3316. doi: 10.3390/ma12203316.
8
Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM.基于微线切割原位制备盘状电极的阵列微槽微电化学加工
Micromachines (Basel). 2020 Jan 7;11(1):66. doi: 10.3390/mi11010066.
9
Characteristics for electrochemical machining with nanoscale voltage pulses.纳米级电压脉冲电化学加工的特性
J Nanosci Nanotechnol. 2009 Jun;9(6):3424-32. doi: 10.1166/jnn.2009.ns12.
10
An experimental study of electrochemical polishing for micro-electro-discharge-machined stainless-steel stents.电化学抛光在微电放电加工不锈钢支架中的应用实验研究。
J Mater Sci Mater Med. 2012 Feb;23(2):349-56. doi: 10.1007/s10856-011-4513-2. Epub 2011 Dec 20.

引用本文的文献

1
Machine learning based optimization of titanium electropolishing using artificial neural networks and Taguchi design in eco-friendly electrolytes.基于机器学习，利用人工神经网络和田口设计对环保型电解液中钛的电解抛光进行优化。
Sci Rep. 2025 Aug 5;15(1):28561. doi: 10.1038/s41598-025-09416-x.
2
Surface-Functionalizing Strategies for Multiplexed Molecular Biosensing: Developments Powered by Advancements in Nanotechnologies.用于多重分子生物传感的表面功能化策略：由纳米技术进步推动的发展
Nanomaterials (Basel). 2024 Dec 14;14(24):2014. doi: 10.3390/nano14242014.
3
Use of Electropolishing in Orthodontic Appliances: An Option to Reduce the Risk of Metal Hypersensitivity.

本文引用的文献

1
Microfabricated fiducial markers for digital image correlation-based micromechanical testing of LIGA Ni alloys.用于基于数字图像相关的LIGA镍合金微机械测试的微制造基准标记
Eng Res Express. 2021 Jun;3(2). doi: 10.1088/2631-8695/abfb10. Epub 2021 May 5.
2
Design and Fabrication of a Ka Band RF MEMS Switch with High Capacitance Ratio and Low Actuation Voltage.具有高电容比和低驱动电压的Ka波段射频微机电系统开关的设计与制造
Micromachines (Basel). 2021 Dec 28;13(1):37. doi: 10.3390/mi13010037.
3
Study of Micro- and Nanopatterned Aluminum Surfaces Using Different Microfabrication Processes for Water Management.
正畸矫治器中电解抛光的应用：降低金属过敏风险的一种选择。
Dent J (Basel). 2024 Jun 24;12(7):193. doi: 10.3390/dj12070193.
4
Clear corneal incision, an important step in modern cataract surgery: a review.透明角膜切口，现代白内障手术的重要步骤：综述。
Eye (Lond). 2023 Oct;37(14):2864-2876. doi: 10.1038/s41433-023-02440-z. Epub 2023 Feb 14.
5
The efficiency of removing heavy metal ions from industrial electropolishing wastewater using natural materials.利用天然材料去除工业电镀废水重金属离子的效率。
Sci Rep. 2022 Oct 22;12(1):17766. doi: 10.1038/s41598-022-22466-9.
使用不同微加工工艺对用于水管理的微米和纳米图案化铝表面的研究。
Langmuir. 2022 Feb 1;38(4):1386-1397. doi: 10.1021/acs.langmuir.1c02517. Epub 2022 Jan 20.
4
Study of Cu Electrochemical Polishing Mechanism With Observation of Water Acceptor Diffusion.通过观察受水物质扩散研究铜的电化学抛光机理
Front Chem. 2021 Oct 21;9:763508. doi: 10.3389/fchem.2021.763508. eCollection 2021.
5
Micromachining of glassy carbon using a Yb-based master oscillator power amplifier nanosecond fiber laser.
Appl Opt. 2021 Oct 10;60(29):9082-9086. doi: 10.1364/AO.430689.
6
Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode.通过低温反应离子刻蚀制备的多功能垂直硅纳米线阵列作为锂离子电池阳极
Sci Rep. 2021 Oct 5;11(1):19779. doi: 10.1038/s41598-021-99173-4.
7
Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication.反应离子蚀刻的最新进展及高深宽比微纳加工的应用
Micromachines (Basel). 2021 Aug 20;12(8):991. doi: 10.3390/mi12080991.
8
Composite Elastomer-Enabled Rapid Photofabrication of Microfluidic Devices.
ACS Appl Mater Interfaces. 2021 Aug 11;13(31):37589-37597. doi: 10.1021/acsami.1c06143. Epub 2021 Jul 30.
9
Reduced Etch Lag and High Aspect Ratios by Deep Reactive Ion Etching (DRIE).通过深反应离子刻蚀（DRIE）减少刻蚀延迟并实现高纵横比
Micromachines (Basel). 2021 May 10;12(5):542. doi: 10.3390/mi12050542.
10
Preparation of Microneedle Array Mold Based on MEMS Lithography Technology.基于微机电系统光刻技术的微针阵列模具制备
Micromachines (Basel). 2020 Dec 28;12(1):23. doi: 10.3390/mi12010023.