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考虑车载激光雷达外部振动的电磁微机电系统扭转微镜的动态建模与抗干扰控制

Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR.

作者信息

Hua Yong, Wang Shuangyuan, Li Bingchu, Bai Guozhen, Zhang Pengju

机构信息

School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China.

Deep Sea High-End Equipment Complex System Research Institute, University of Shanghai for Science and Technology, Shanghai 200093, China.

出版信息

Micromachines (Basel). 2021 Jan 9;12(1):69. doi: 10.3390/mi12010069.

DOI:10.3390/mi12010069
PMID:33435401
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7826558/
Abstract

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

摘要

基于微机电系统（MEMS）技术的微镜广泛应用于不同领域，如光开关和医学扫描成像。作为MEMS激光雷达的关键部件，电磁MEMS扭转微镜具有尺寸小、结构简单和能耗低的优点。然而，在实际使用情况下，由于车辆振动，MEMS微镜面临严重干扰。本文考虑外部振动，研究了MEMS微镜的精确运动控制。提出了一种考虑振动与扭转耦合的MEMS微镜动力学模型。采用实验方法识别了动力学模型中的系数。本文提出了一种前馈滑模控制方法（FSMC）。通过建立电磁MEMS扭转微镜的动态耦合模型，对所提出的FSMC在考虑外部振动的情况下进行了评估，并在鲁棒性和精度方面与传统的比例积分微分（PID）控制进行了比较。仿真实验结果表明，FSMC控制器相对于PID控制器具有一定优势。本文揭示了MEMS微镜的耦合动力学，可用于MEMS微镜的动态分析和控制算法设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/e65aeb189856/micromachines-12-00069-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/79cce5dcf16e/micromachines-12-00069-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/31bb361e9c33/micromachines-12-00069-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/b6a880c644a1/micromachines-12-00069-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/9ba8dce443f6/micromachines-12-00069-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/26a586a4f825/micromachines-12-00069-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/78f72ed8bb79/micromachines-12-00069-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/8d45e6e261ef/micromachines-12-00069-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/38960ade2592/micromachines-12-00069-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/e65aeb189856/micromachines-12-00069-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/79cce5dcf16e/micromachines-12-00069-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/19ca119976e4/micromachines-12-00069-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/8c82b5cbd60e/micromachines-12-00069-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/5c0c883a4a72/micromachines-12-00069-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/7fade56dbd0b/micromachines-12-00069-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/800635d99877/micromachines-12-00069-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/31bb361e9c33/micromachines-12-00069-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/b6a880c644a1/micromachines-12-00069-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/9ba8dce443f6/micromachines-12-00069-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/26a586a4f825/micromachines-12-00069-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/78f72ed8bb79/micromachines-12-00069-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/8d45e6e261ef/micromachines-12-00069-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/38960ade2592/micromachines-12-00069-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/66b6/7826558/e65aeb189856/micromachines-12-00069-g014.jpg

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