Scigala Aleksandra, Szłyk Edward, Rerek Tomasz, Wiśniewski Marek, Skowronski Lukasz, Trzcinski Marek, Szczesny Robert
Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland.
Institute of Physics, Faculty of Physics, Astronomy and Informatics, Nicolaus Copernicus University in Toruń, Grudziadzka 5, 87-100 Torun, Poland.
Materials (Basel). 2021 Jan 28;14(3):603. doi: 10.3390/ma14030603.
Copper nitride nanowire arrays were synthesized by an ammonolysis reaction of copper oxide precursors grown on copper surfaces in an ammonia solution. The starting Cu films were deposited on a silicon substrate using two different methods: thermal evaporation (30 nm thickness) and electroplating (2 μm thickness). The grown CuO or CuO/Cu(OH) architectures were studied in regard to morphology and size, using electron microscopy methods (SEM, TEM). The final shape and composition of the structures were mostly affected by the concentration of the ammonia solution and time of the immersion. Needle-shaped 2-3 μm long nanostructures were formed from the electrodeposited copper films placed in a 0.033 M NH solution for 48 h, whereas for the copper films obtained by physical vapor deposition (PVD), well-aligned nano-needles were obtained after 3 h. The phase composition of the films was studied by X-ray diffraction (XRD) and selected area electron diffraction (SAED) analysis, indicating a presence of CuO and Cu(OH), as well as Cu residues. Therefore, in order to obtain a pure oxide film, the samples were thermally treated at 120-180 °C, after which the morphology of the structures remained unchanged. In the final stage of this study, CuN nanostructures were obtained by an ammonolysis reaction at 310 °C and studied by SEM, TEM, XRD, and spectroscopic methods. The fabricated PVD-derived coatings were also analyzed using a spectroscopic ellipsometry method, in order to calculate dielectric function, band gap and film thickness.
通过在氨溶液中对生长在铜表面的氧化铜前驱体进行氨解反应来合成氮化铜纳米线阵列。起始的铜膜使用两种不同方法沉积在硅衬底上:热蒸发(厚度30纳米)和电镀(厚度2微米)。使用电子显微镜方法(扫描电子显微镜、透射电子显微镜)研究了生长的氧化铜或氧化铜/氢氧化铜结构的形态和尺寸。结构的最终形状和组成主要受氨溶液浓度和浸泡时间的影响。将电沉积铜膜置于0.033 M氨溶液中48小时后形成了2 - 3微米长的针状纳米结构,而对于通过物理气相沉积(PVD)获得的铜膜,3小时后得到了排列良好的纳米针。通过X射线衍射(XRD)和选区电子衍射(SAED)分析研究了膜的相组成,表明存在氧化铜、氢氧化铜以及铜残余物。因此,为了获得纯氧化膜,将样品在120 - 180°C下进行热处理,之后结构的形态保持不变。在本研究的最后阶段,通过在310°C下的氨解反应获得了氮化铜纳米结构,并通过扫描电子显微镜、透射电子显微镜、X射线衍射和光谱方法进行了研究。还使用光谱椭偏法对制备的物理气相沉积衍生涂层进行了分析,以计算介电函数、带隙和膜厚度。