Car Tihomir, Jakovac Ivan, Šarić Ivana, Bernstorff Sigrid, Micetic Maja
Ruđer Bošković Institute, Bijenička Cesta 54, 10000 Zagreb, Croatia.
Physics Department, University of Zagreb, Bijenička Cesta 46, 10000 Zagreb, Croatia.
Materials (Basel). 2021 Feb 6;14(4):766. doi: 10.3390/ma14040766.
Structural, optical and electrical properties of Al+MoO and Au+MoO thin films prepared by simultaneous magnetron sputtering deposition were investigated. The influence of MoO sputtering power on the Al and Au nanoparticle formation and spatial distribution was explored. We demonstrated the formation of spatially arranged Au nanoparticles in the MoO matrix, while Al incorporates in the MoO matrix without nanoparticle formation. The dependence of the Au nanoparticle size and arrangement on the MoO sputtering power was established. The Al-based films show a decrease of overall absorption with an Al content increase, while the Au-based films have the opposite trend. The transport properties of the investigated films also are completely different. The resistivity of the Al-based films increases with the Al content, while it decreases with the Au content increase. The reason is a different transport mechanism that occurs in the films due to their different structural properties. The choice of the incorporated material (Al or Au) and its volume percentage in the MoO matrix enables the design of materials with desirable optical and electrical characteristics for a variety of applications.
研究了通过同时磁控溅射沉积制备的Al+MoO和Au+MoO薄膜的结构、光学和电学性质。探讨了MoO溅射功率对Al和Au纳米颗粒形成及空间分布的影响。我们证明了在MoO基体中形成了空间排列的Au纳米颗粒，而Al则融入MoO基体中且未形成纳米颗粒。确定了Au纳米颗粒尺寸和排列对MoO溅射功率的依赖性。Al基薄膜随着Al含量的增加整体吸收率降低，而Au基薄膜则呈现相反趋势。所研究薄膜的传输性质也完全不同。Al基薄膜的电阻率随Al含量增加而增大，而随Au含量增加而减小。原因是由于薄膜不同的结构性质而在其中发生了不同的传输机制。在MoO基体中掺入材料（Al或Au）及其体积百分比的选择使得能够设计出具有各种应用所需光学和电学特性的材料。
