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一种具有大驱动电流的陡坡型金属氧化物半导体/石墨烯狄拉克源场效应晶体管。

A Steep-Slope MoS/Graphene Dirac-Source Field-Effect Transistor with a Large Drive Current.

作者信息

Tang Zhaowu, Liu Chunsen, Huang Xiaohe, Zeng Senfeng, Liu Liwei, Li Jiayi, Jiang Yu-Gang, Zhang David Wei, Zhou Peng

机构信息

State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China.

School of Computer Science, Fudan University, Shanghai 200433, China.

出版信息

Nano Lett. 2021 Feb 24;21(4):1758-1764. doi: 10.1021/acs.nanolett.0c04657. Epub 2021 Feb 10.

Abstract

In the continuous transistor feature size scaling down, the scaling of the supply voltage is stagnant because of the subthreshold swing (SS) limit. A transistor with a new mechanism is needed to break through the thermionic limit of SS and hold the large drive current at the same time. Here, by adopting the recently proposed Dirac-source field-effect transistor (DSFET) technology, we experimentally demonstrate a MoS/graphene (1.8 nm/0.3 nm) DSFET for the first time, and a steep SS of 37.9 mV/dec at room temperature with nearly free hysteresis is observed. Besides, by bringing in the structure of gate-all-around (GAA), the MoS/graphene DSFET exhibits a steeper SS of 33.5 mV/dec and a 40% increased normalized drive current up to 52.7 μA·μm/μm ( = 1 V) with a current on/off ratio of 10, which shows potential for low-power and high-performance electronics applications.

摘要

在晶体管特征尺寸不断缩小的过程中,由于亚阈值摆幅(SS)限制,电源电压的缩放陷入停滞。需要一种具有新机制的晶体管来突破SS的热电子极限,同时保持大驱动电流。在此,通过采用最近提出的狄拉克源场效应晶体管(DSFET)技术,我们首次通过实验展示了一种MoS/石墨烯(1.8纳米/0.3纳米)DSFET,在室温下观察到了37.9毫伏/十倍频程的陡峭SS,且几乎没有滞后现象。此外,通过引入全栅(GAA)结构,MoS/石墨烯DSFET展现出33.5毫伏/十倍频程的更陡峭SS,归一化驱动电流提高了40%,高达52.7微安·微米/微米(=1伏),电流开/关比为10,这显示出其在低功耗和高性能电子应用方面的潜力。

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