Ferlito Umberto, Grasso Alfio Dario, Vaiana Michele, Bruno Giuseppe
Dipartimento di Ingegneria Elettrica Elettronica e Informatica (DIEEI), University of Catania, 95125 Catania, Italy.
STMicroelectronics, 95121 Catania, Italy.
Sensors (Basel). 2021 Mar 6;21(5):1840. doi: 10.3390/s21051840.
This paper introduces the electronic interface for a capacitive airborne particle matter detector. The proposed circuit relies on two matched ring oscillators and a mixer to detect the frequency difference induced by the deposition of a particle onto an interdigitated capacitor, which constitutes the load of one of the oscillators. The output of the mixer is digitized through a simple counter. In order to compensate the oscillation frequency offset of the two ring oscillators due to process and mismatch variations, a capacitive trimming circuit has been implemented. The sensor is connected to host through an I2C interface for communication and configuration. The sensor has been implemented using a standard 130-nm CMOS technology by STMicroelectronics and occupies 0.12-mm die area. Experimental measurements using talcum powder show a sensitivity of 60 kHz/fF and a 3σ resolution equal to 165 aF.
本文介绍了一种用于电容式机载颗粒物探测器的电子接口。所提出的电路依靠两个匹配的环形振荡器和一个混频器来检测粒子沉积到构成其中一个振荡器负载的叉指电容器上所引起的频率差。混频器的输出通过一个简单的计数器进行数字化。为了补偿由于工艺和失配变化导致的两个环形振荡器的振荡频率偏移，已实现了一个电容式微调电路。该传感器通过I²C接口连接到主机进行通信和配置。该传感器采用意法半导体的标准130纳米CMOS技术实现，占用0.12平方毫米的芯片面积。使用滑石粉的实验测量结果显示灵敏度为60 kHz/fF，3σ分辨率等于165 aF。
