IEEE Trans Biomed Circuits Syst. 2007 Dec;1(4):270-7. doi: 10.1109/TBCAS.2008.915641.
A hybrid microfluidic/IC capacitive sensor is presented in this paper for highly integrated lab-on-chips (LoCs). We put forward the design and implementation of a charge based capacitive sensor array in 0.18-mum CMOS process. This sensor chip is incorporated with a microfluidic channel using direct-write microfluidic fabrication process (DWFP). The design, construction and experimental results as well are demonstrated using four different chemical solutions with known dielectric constants. The proposed highly sensitive CMOS capacitive sensor (ap530 mV/fF) along with low complexity DWFP emerges as clear favorite for LoC applications.
本文提出了一种混合微流/IC 电容传感器，用于高度集成的片上实验室（LoC）。我们提出了一种基于电荷的电容传感器阵列的设计和实现，该阵列采用 0.18 微米 CMOS 工艺。该传感器芯片采用直接写入微流控制造工艺（DWFP）与微流道集成。使用具有已知介电常数的四种不同化学溶液对设计、构建和实验结果进行了演示。提出的高灵敏度 CMOS 电容传感器（ap530 mV/fF）以及低复杂度的 DWFP 成为 LoC 应用的首选。
