Li Chi, Mendelson Noah, Ritika Ritika, Chen YongLiang, Xu Zai-Quan, Toth Milos, Aharonovich Igor
School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, Australia.
ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, Australia.
Nano Lett. 2021 Apr 28;21(8):3626-3632. doi: 10.1021/acs.nanolett.1c00685. Epub 2021 Apr 19.
We demonstrate the fabrication of large-scale arrays of single-photon emitters (SPEs) in hexagonal boron nitride (hBN). Bottom-up growth of hBN onto nanoscale arrays of dielectric pillars yields corresponding arrays of hBN emitters at the pillar sites. Statistical analysis shows that the pillar diameter is critical for isolating single defects, and diameters of ∼250 nm produce a near-unity yield of a single emitter at each pillar site. Our results constitute a promising route toward spatially controlled generation of hBN SPEs and provide an effective and efficient method to create large-scale SPE arrays. The results pave the way to scalability and high throughput fabrication of SPEs for advanced quantum photonic applications.
我们展示了在六方氮化硼（hBN）中制造大规模单光子发射器（SPE）阵列的方法。通过将hBN自下而上生长在介电柱的纳米级阵列上，在柱位置产生了相应的hBN发射器阵列。统计分析表明，柱直径对于隔离单个缺陷至关重要，约250 nm的直径在每个柱位置产生单个发射器的近乎统一的产率。我们的结果为hBN SPE的空间控制生成提供了一条有前景的途径，并提供了一种有效且高效的方法来创建大规模SPE阵列。这些结果为先进量子光子应用中SPE的可扩展性和高通量制造铺平了道路。
