Arnoult Alexandre, Colin Jonathan
LAAS-CNRS, Université de Toulouse, CNRS, Toulouse, France.
Sci Rep. 2021 Apr 30;11(1):9393. doi: 10.1038/s41598-021-88722-6.
The in situ and real-time measurement of curvature changes of optically reflecting surfaces is a key element to better control bottom-up fabrication processes in the semiconductor industry, but also to follow or adjust mirror deformations during fabrication and use for space or optics industries. Despite progresses made in the last two decades thanks to laser deflectometry-based techniques, the community lacks an instrument, easy to use, robust to tough environments and easily compatible with a large range of fabrication processes. We describe here a new method, called magnification inferred curvature (MIC), based on the determination of the magnification factor of the virtual image size of a known object created by a reflecting curved surface (the substrate) acting as a spherical mirror. The optical formalism, design, and proof of concept are presented. The precision, accuracy, and advantages of the MIC method are illustrated from selected examples taken from real-time growth monitoring and compared with state-of-the-art laser deflectometry-based instruments.
对光学反射表面曲率变化进行原位实时测量，不仅是更好地控制半导体行业自下而上制造工艺的关键因素，也是在制造过程中跟踪或调整镜面变形以及用于航天或光学行业的关键。尽管在过去二十年中，基于激光偏转测量技术取得了进展，但该领域仍缺乏一种易于使用、能适应恶劣环境且易于与多种制造工艺兼容的仪器。我们在此描述一种新方法，称为放大率推断曲率法（MIC），该方法基于确定由作为球面镜的反射曲面（衬底）所创建的已知物体的虚像尺寸的放大率。本文介绍了其光学形式、设计及概念验证。通过从实时生长监测中选取的示例说明了MIC方法的精度、准确性和优势，并与基于激光偏转测量的现有仪器进行了比较。
