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夹心应变周期多层AlN/GaN对a面GaN的应变和晶体质量的影响

Impact of sandwiched strain periodic multilayer AlN/GaN on strain and crystalline quality of a-plane GaN.

作者信息

Kamarundzaman Anas, Abu Bakar Ahmad Shuhaimi, Azman Adreen, Omar Al-Zuhairi, Talik Noor Azrina, Supangat Azzuliani, Abd Majid Wan Haliza

机构信息

Low Dimensional Materials Research Centre, Department of Physics, Faculty of Science, University of Malaya, 50603, Kuala Lumpur, Malaysia.

Nanotechnology Research Centre, Department of Physics, Faculty of Science and Mathematics, Universiti Pendidikan Sultan Idris, 35900, Tanjong Malim, Perak, Malaysia.

出版信息

Sci Rep. 2021 May 6;11(1):9724. doi: 10.1038/s41598-021-89201-8.

DOI:10.1038/s41598-021-89201-8
PMID:33958689
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8102578/
Abstract

We demonstrated high-quality single crystalline a-plane undoped-gallium nitride grown on a nonpatterned r-plane sapphire substrate via metal-organic chemical vapor deposition. The effect of four different numbers of sandwiched strain-periodic AlN/GaN multilayers on the strain state, crystal quality, optical and electrical properties was investigated. Field emission scanning electron microscopy and atomic force microscopy showed that the surface morphology was improved upon insertion of 120 pairs of AlN/GaN thin layers with a root-mean-square roughness of 2.15 nm. On-axis X-ray ω-scan rocking curves showed enhanced crystalline quality: the full width at half maximum decreased from 1224 to 756 arcsec along the [0001] direction and from 2628 to 1360 arcsec along the [1-100] direction for a-GaN grown with 120 pairs of AlN/GaN compared to a-GaN without AlN/GaN pairs. Reciprocal space mapping showed that a-plane GaN with a high number of AlN/GaN pairs exhibits near-relaxation strain states. Room-temperature photoluminescence spectra showed that the sample with the highest number of AlN/GaN pairs exhibited the lowest-intensity yellow and blue luminescence bands, indicating a reduction in defects and dislocations. The a-plane InGaN/GaN LEDs with 120 pairs of SSPM-L AlN/GaN exhibited a significant increase (~ 250%) in light output power compared to that of LEDs without SSPM-L AlN/GaN pairs.

摘要

我们展示了通过金属有机化学气相沉积在无图案的r面蓝宝石衬底上生长的高质量单晶a面未掺杂氮化镓。研究了四种不同数量的夹芯应变周期性AlN/GaN多层结构对应变状态、晶体质量、光学和电学性质的影响。场发射扫描电子显微镜和原子力显微镜表明,插入120对AlN/GaN薄层后表面形貌得到改善,均方根粗糙度为2.15 nm。轴向X射线ω扫描摇摆曲线显示晶体质量增强:与未生长AlN/GaN对的a-GaN相比,生长有120对AlN/GaN的a-GaN沿[0001]方向的半高宽从1224弧秒降至756弧秒,沿[1-100]方向从2628弧秒降至1360弧秒。倒易空间映射表明,具有大量AlN/GaN对的a面GaN呈现近弛豫应变状态。室温光致发光光谱表明,AlN/GaN对数量最多的样品呈现出最低强度的黄色和蓝色发光带,表明缺陷和位错减少了。与没有SSPM-L AlN/GaN对的发光二极管相比,具有120对SSPM-L AlN/GaN的a面InGaN/GaN发光二极管的光输出功率显著增加(约250%)。

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本文引用的文献

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Materials (Basel). 2019 Aug 14;12(16):2583. doi: 10.3390/ma12162583.
2
Very high external quantum efficiency and wall-plug efficiency 527 nm InGaN green LEDs by MOCVD.通过金属有机化学气相沉积法制备的527纳米氮化铟镓绿色发光二极管具有非常高的外量子效率和壁插效率。
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3
Carbon-Related Defects as a Source for the Enhancement of Yellow Luminescence of Unintentionally Doped GaN.
碳相关缺陷作为增强非故意掺杂GaN黄色发光的一个来源。
Nanomaterials (Basel). 2018 Sep 19;8(9):744. doi: 10.3390/nano8090744.
4
Overgrowth and strain investigation of (11-20) non-polar GaN on patterned templates on sapphire.蓝宝石上图案化模板上(11-20)非极性氮化镓的过生长及应变研究
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Electronic states of deep trap levels in a-plane GaN templates grown on r-plane sapphire by HVPE.通过氢化物气相外延(HVPE)在r面蓝宝石上生长的a面氮化镓模板中深陷阱能级的电子态。
Sci Rep. 2018 May 18;8(1):7814. doi: 10.1038/s41598-018-26290-y.
6
Photoluminescence Study of Gallium Nitride Thin Films Obtained by Infrared Close Space Vapor Transport.通过红外近空间气相传输法制备的氮化镓薄膜的光致发光研究
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Anisotropically biaxial strain in non-polar (112-0) plane In Ga N/GaN layers investigated by X-ray reciprocal space mapping.通过 X 射线倒易空间映射研究非极性 (112-0) 平面内 GaN/GaN 层中的各向异性双轴应变。
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