Huang Xiaohe, Liu Chunsen, Zeng Senfeng, Tang Zhaowu, Wang Shuiyuan, Chen Xiaozhang, Zhang David Wei, Zhou Peng
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, 200433, China.
Frontier Institute of Chip and System, Fudan University, Shanghai, 200433, China.
Adv Mater. 2021 Sep;33(37):e2102201. doi: 10.1002/adma.202102201. Epub 2021 Aug 1.
Multibridge channel field-effect transistors (MBCFETs) enable improved gate control and flow of a large drive current and they are regarded as promising candidates for next-generation transistor architecture. However, in achieving a larger drive current with a thinner channel, limitations arise from the decrease in mobility when the thickness of the Si nanosheet is less than 5 nm. In addition, an increase in the leakage current is unavoidable when a large number of channels are stacked. Here, a 2D ultrathin MBCFET is demonstrate, constructed based on 2 nm/2 nm MoS channels. The normalized drive current (23.11 µA*µm µm ) in each level channel of this MBCFET exceeds that of the latest seven-level-stacked Si MBCFET, while the leakage current is only 0.4% of this value, with the subthreshold swing reaching 60 mV dec and an on/off ratio reaching up to 4 × 10 at room temperature. Furthermore, the drive current of this 2D ultrathin MBCFET can be further increased by regulating the polarity of the operation voltage to reduce the injection barrier. The combination of 2D materials and an MBC structure has the potential for use in high-performance and low-power-consumption electronics.
多桥沟道场效应晶体管(MBCFET)能够实现更好的栅极控制并实现大驱动电流的流动,它们被视为下一代晶体管架构的有潜力的候选者。然而,在通过更薄的沟道实现更大驱动电流时,当硅纳米片厚度小于5纳米时,迁移率的降低会带来限制。此外,当大量沟道堆叠时,漏电流的增加是不可避免的。在此,展示了一种基于2纳米/2纳米MoS沟道构建的二维超薄MBCFET。该MBCFET每个能级沟道中的归一化驱动电流(23.11 µA*µm µm)超过了最新的七级堆叠硅MBCFET,而漏电流仅为此值的0.4%,亚阈值摆幅达到60 mV dec,室温下开/关比高达4×10。此外,通过调节操作电压的极性以降低注入势垒,可以进一步提高这种二维超薄MBCFET的驱动电流。二维材料与MBC结构的结合有潜力用于高性能和低功耗电子设备。