磁阻传感器与微机电系统的混合集成作为检测超低磁场的一种策略。
Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields.
作者信息
Valadeiro João, Cardoso Susana, Macedo Rita, Guedes Andre, Gaspar João, Freitas Paulo P
机构信息
Instituto de Engenharia de Sistemas de Computadores-Microsystems and Nanotechnology (INESC-MN), Rua Alves Redol, No. 9, Lisboa 1000-029, Portugal.
Instituto Superior Técnico IST, Physics Department, Universidade de Lisboa, Lisbon 1049-001, Portugal.
出版信息
Micromachines (Basel). 2016 May 11;7(5):88. doi: 10.3390/mi7050088.
In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, lower detectivities are expected when compared with those obtained for individual sensors. This particularity results from the change of sensor's operating point to frequencies above the 1/ noise knee.
在本文中，我们描述了磁阻传感器如何与微机电系统（MEMS）器件集成，利用包含磁通导向器的MEMS结构将直流或低频外部磁场机械调制为高频磁场。在这种混合架构中，与单个传感器相比，预计探测灵敏度会降低。这种特殊性源于传感器工作点向高于1/噪声拐点频率的变化。
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