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晶圆级单晶二维材料合成的策略、现状与挑战

Strategies, Status, and Challenges in Wafer Scale Single Crystalline Two-Dimensional Materials Synthesis.

作者信息

Zhang Leining, Dong Jichen, Ding Feng

机构信息

Centre for Multidimensional Carbon Materials, Institute for Basic Science, Ulsan 44919, South Korea.

School of Materials Science and Engineering, Ulsan National Institute of Science and Technology, Ulsan 44919, South Korea.

出版信息

Chem Rev. 2021 Jun 9;121(11):6321-6372. doi: 10.1021/acs.chemrev.0c01191. Epub 2021 May 28.

DOI:10.1021/acs.chemrev.0c01191
PMID:34047544
Abstract

The successful exfoliation of graphene has given a tremendous boost to research on various two-dimensional (2D) materials in the last 15 years. Different from traditional thin films, a 2D material is composed of one to a few atomic layers. While atoms within a layer are chemically bonded, interactions between layers are generally weak van der Waals (vdW) interactions. Due to their particular dimensionality, 2D materials exhibit special electronic, magnetic, mechanical, and thermal properties, not found in their 3D counterparts, and therefore they have great potential in various applications, such as 2D materials-based devices. To fully realize their large-scale practical applications, especially in devices, wafer scale single crystalline (WSSC) 2D materials are indispensable. In this review, we present a detailed overview on strategies toward the synthesis of WSSC 2D materials while highlighting the recent progress on WSSC graphene, hexagonal boron nitride (hBN), and transition metal dichalcogenide (TMDC) synthesis. The challenges that need to be addressed in future studies have also been described. In general, there have been two distinct routes to synthesize WSSC 2D materials: (i) allowing only one nucleus on a wafer scale substrate to be formed and developed into a large single crystal and (ii) seamlessly stitching a large number of unidirectionally aligned 2D islands on a wafer scale substrate, which is generally single crystalline. Currently, the synthesis of WSSC graphene has been realized by both routes, and WSSC hBN and MoS have been synthesized by route (ii). On the other hand, the growth of other WSSC 2D materials and WSSC multilayer 2D materials still remains a big challenge. In the last section, we wrap up this review by summarizing the future challenges and opportunities in the synthesis of various WSSC 2D materials.

摘要

在过去的15年里,石墨烯的成功剥离极大地推动了各种二维(2D)材料的研究。与传统薄膜不同,二维材料由一到几个原子层组成。虽然层内原子通过化学键结合,但层间相互作用通常是较弱的范德华(vdW)相互作用。由于其特殊的维度,二维材料展现出三维对应物所没有的特殊电子、磁性、机械和热学性质,因此它们在各种应用中具有巨大潜力,例如基于二维材料的器件。为了充分实现其大规模实际应用,特别是在器件方面,晶圆级单晶(WSSC)二维材料是必不可少的。在这篇综述中,我们详细概述了合成WSSC二维材料的策略,同时突出了WSSC石墨烯、六方氮化硼(hBN)和过渡金属二硫属化物(TMDC)合成方面的最新进展。还描述了未来研究中需要解决的挑战。一般来说,合成WSSC二维材料有两条不同的途径:(i)在晶圆级衬底上仅允许形成一个核并发展成大单晶;(ii)在通常为单晶的晶圆级衬底上无缝拼接大量单向排列的二维岛。目前,两条途径都实现了WSSC石墨烯的合成,途径(ii)实现了WSSC hBN和MoS₂的合成。另一方面,其他WSSC二维材料和WSSC多层二维材料的生长仍然是一个巨大挑战。在最后一部分,我们通过总结各种WSSC二维材料合成中的未来挑战和机遇来结束这篇综述。

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