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用于传感器阵列的交换偏置δ-E效应磁力计的建模与并行操作

Modeling and Parallel Operation of Exchange-Biased Delta-E Effect Magnetometers for Sensor Arrays.

作者信息

Spetzler Benjamin, Wiegand Patrick, Durdaut Phillip, Höft Michael, Bahr Andreas, Rieger Robert, Faupel Franz

机构信息

Institute of Materials Science, Faculty of Engineering, Kiel University, 24143 Kiel, Germany.

出版信息

Sensors (Basel). 2021 Nov 16;21(22):7594. doi: 10.3390/s21227594.

Abstract

Recently, Delta-E effect magnetic field sensors based on exchange-biased magnetic multilayers have shown the potential of detecting low-frequency and small-amplitude magnetic fields. Their design is compatible with microelectromechanical system technology, potentially small, and therefore, suitable for arrays with a large number N of sensor elements. In this study, we explore the prospects and limitations for improving the detection limit by averaging the output of N sensor elements operated in parallel with a single oscillator and a single amplifier to avoid additional electronics and keep the setup compact. Measurements are performed on a two-element array of exchange-biased sensor elements to validate a signal and noise model. With the model, we estimate requirements and tolerances for sensor elements using larger N. It is found that the intrinsic noise of the sensor elements can be considered uncorrelated, and the signal amplitude is improved if the resonance frequencies differ by less than approximately half the bandwidth of the resonators. Under these conditions, the averaging results in a maximum improvement in the detection limit by a factor of N. A maximum N≈200 exists, which depends on the read-out electronics and the sensor intrinsic noise. Overall, the results indicate that significant improvement in the limit of detection is possible, and a model is presented for optimizing the design of delta-E effect sensor arrays in the future.

摘要

最近,基于交换偏置磁性多层膜的Δ-E效应磁场传感器已显示出检测低频和小幅度磁场的潜力。它们的设计与微机电系统技术兼容,体积可能较小,因此适用于具有大量N个传感器元件的阵列。在本研究中,我们探讨了通过对与单个振荡器和单个放大器并行运行的N个传感器元件的输出进行平均来提高检测限的前景和局限性,以避免额外的电子设备并保持设置紧凑。在一个由交换偏置传感器元件组成的二元阵列上进行测量,以验证信号和噪声模型。利用该模型,我们估计了使用更大N值时传感器元件的要求和公差。结果发现,传感器元件的固有噪声可被视为不相关的,并且如果共振频率的差异小于谐振器带宽的大约一半,则信号幅度会得到改善。在这些条件下,平均操作可使检测限最大提高N倍。存在一个最大N≈200,这取决于读出电子设备和传感器固有噪声。总体而言,结果表明检测限有可能得到显著改善,并提出了一个模型,以便未来优化Δ-E效应传感器阵列的设计。

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