用于化学气相沉积生长单晶石墨烯的衬底工程
Substrate Engineering for CVD Growth of Single Crystal Graphene.
作者信息
Huang Ming, Deng Bangwei, Dong Fan, Zhang Lili, Zhang Zheye, Chen Peng
机构信息
School of Chemical and Biomedical Engineering, Nanyang Technological University, 70 Nanyang Drive, Singapore, 637457, Singapore.
Research Center for Environmental Science & Technology, Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 611731, China.
出版信息
Small Methods. 2021 May;5(5):e2001213. doi: 10.1002/smtd.202001213. Epub 2021 Feb 5.
Single crystal graphene (SCG) has attracted enormous attention for its unique potential for next-generation high-performance optoelectronics. In the absence of grain boundaries, the exceptional intrinsic properties of graphene are preserved by SCG. Currently, chemical vapor deposition (CVD) has been recognized as an effective method for the large-scale synthesis of graphene films. However, polycrystalline films are usually obtained and the present grain boundaries compromise the carrier mobility, thermal conductivity, optical properties, and mechanical properties. The scalable and controllable synthesis of SCG is challenging. Recently, much attention has been attracted by the engineering of large-size single-crystal substrates for the epitaxial CVD growth of large-area and high-quality SCG films. In this article, a comprehensive and comparative review is provided on the selection and preparation of various single-crystal substrates for CVD growth of SCG under different conditions. The growth mechanisms, current challenges, and future development and perspectives are discussed.
单晶石墨烯(SCG)因其在下一代高性能光电子学方面的独特潜力而备受关注。在没有晶界的情况下,石墨烯的优异本征特性被单晶石墨烯所保留。目前,化学气相沉积(CVD)已被公认为大规模合成石墨烯薄膜的有效方法。然而,通常获得的是多晶薄膜,当前的晶界会损害载流子迁移率、热导率、光学性能和机械性能。单晶石墨烯的可扩展和可控合成具有挑战性。最近,用于大面积高质量单晶石墨烯薄膜外延CVD生长的大尺寸单晶衬底工程引起了广泛关注。本文对不同条件下单晶石墨烯CVD生长的各种单晶衬底的选择和制备进行了全面且比较性的综述。讨论了生长机制、当前挑战以及未来的发展和前景。