• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

用于高视场激光雷达应用的MEMS扫描器测试平台

MEMS-Scanner Testbench for High Field of View LiDAR Applications.

作者信息

Baier Valentin, Schardt Michael, Fink Maximilian, Jakobi Martin, Koch Alexander W

机构信息

Institute for Measurement Systems and Sensor Technology, Technical University of Munich, 80333 Munich, Germany.

Optics Department, Blickfeld GmbH, 80339 Munich, Germany.

出版信息

Sensors (Basel). 2021 Dec 22;22(1):39. doi: 10.3390/s22010039.

DOI:10.3390/s22010039
PMID:35009592
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8747549/
Abstract

LiDAR sensors are a key technology for enabling safe autonomous cars. For highway applications, such systems must have a long range, and the covered field of view (FoV) of >45° must be scanned with resolutions higher than 0.1°. These specifications can be met by modern MEMS scanners, which are chosen for their robustness and scalability. For the automotive market, these sensors, and especially the scanners within, must be tested to the highest standards. We propose a novel measurement setup for characterizing and validating these kinds of scanners based on a position-sensitive detector (PSD) by imaging a deflected laser beam from a diffuser screen onto the PSD. A so-called ray trace shifting technique (RTST) was used to minimize manual calibration effort, to reduce external mounting errors, and to enable dynamical one-shot measurements of the scanner's steering angle over large FoVs. This paper describes the overall setup and the calibration method according to a standard camera calibration. We further show the setup's capabilities by validating it with a statically set rotating stage and a dynamically oscillating MEMS scanner. The setup was found to be capable of measuring LiDAR MEMS scanners with a maximum FoV of 47° dynamically, with an uncertainty of less than 1%.

摘要

激光雷达传感器是实现安全自动驾驶汽车的关键技术。对于高速公路应用,此类系统必须具备远距离探测能力,并且大于45°的覆盖视场(FoV)必须以高于0.1°的分辨率进行扫描。现代微机电系统(MEMS)扫描仪能够满足这些规格要求,因其具有坚固性和可扩展性而被选用。对于汽车市场,这些传感器,尤其是其中的扫描仪,必须按照最高标准进行测试。我们提出了一种新颖的测量装置,用于基于位置敏感探测器(PSD)对这类扫描仪进行表征和验证,该方法是将来自漫射屏的偏转激光束成像到PSD上。一种所谓的光线追踪移位技术(RTST)被用于最小化手动校准工作量、减少外部安装误差,并能够在大视场内对扫描仪的转向角进行动态一次性测量。本文描述了根据标准相机校准的整体装置和校准方法。我们还通过使用静态设置的旋转台和动态振荡的MEMS扫描仪对其进行验证,展示了该装置的能力。结果发现该装置能够动态测量最大视场为47°的激光雷达MEMS扫描仪,不确定度小于1%。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/3b8dce34cc8b/sensors-22-00039-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/525e72ee63d2/sensors-22-00039-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/3b8fcb69e277/sensors-22-00039-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/d67261b679da/sensors-22-00039-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/569d5d8cb66e/sensors-22-00039-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/d68ae518afff/sensors-22-00039-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/58fd91ddee14/sensors-22-00039-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/3b8dce34cc8b/sensors-22-00039-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/525e72ee63d2/sensors-22-00039-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/3b8fcb69e277/sensors-22-00039-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/d67261b679da/sensors-22-00039-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/569d5d8cb66e/sensors-22-00039-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/d68ae518afff/sensors-22-00039-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/58fd91ddee14/sensors-22-00039-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d24e/8747549/3b8dce34cc8b/sensors-22-00039-g007.jpg

相似文献

1
MEMS-Scanner Testbench for High Field of View LiDAR Applications.用于高视场激光雷达应用的MEMS扫描器测试平台
Sensors (Basel). 2021 Dec 22;22(1):39. doi: 10.3390/s22010039.
2
MEMS Mirrors for LiDAR: A review.用于激光雷达的微机电系统(MEMS)镜子:综述
Micromachines (Basel). 2020 Apr 27;11(5):456. doi: 10.3390/mi11050456.
3
Performance Evaluation of MEMS-Based Automotive LiDAR Sensor and Its Simulation Model as per ASTM E3125-17 Standard.基于 MEMS 的汽车激光雷达传感器的性能评估及其符合 ASTM E3125-17 标准的仿真模型。
Sensors (Basel). 2023 Mar 14;23(6):3113. doi: 10.3390/s23063113.
4
Low-voltage wide-field-of-view lidar scanning system based on a MEMS mirror.基于微机电系统(MEMS)镜的低电压宽视场激光雷达扫描系统。
Appl Opt. 2019 Feb 10;58(5):A283-A290. doi: 10.1364/AO.58.00A283.
5
All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror.采用混合光学架构、数字微镜器件和二维微机电系统(MEMS)镜的全微机电系统激光雷达
Micromachines (Basel). 2022 Sep 1;13(9):1444. doi: 10.3390/mi13091444.
6
A large-scale microelectromechanical-systems-based silicon photonics LiDAR.一款基于大规模微机电系统的硅光子学激光雷达。
Nature. 2022 Mar;603(7900):253-258. doi: 10.1038/s41586-022-04415-8. Epub 2022 Mar 9.
7
Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror.基于扫描 MEMS 镜的高角分辨率 360°激光雷达的发展。
Sci Rep. 2023 Jan 27;13(1):1540. doi: 10.1038/s41598-022-26394-6.
8
Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application.用于激光雷达应用的梳齿驱动MEMS镜对快速同步方法
Micromachines (Basel). 2021 Oct 21;12(11):1292. doi: 10.3390/mi12111292.
9
New Scheme of MEMS-Based LiDAR by Synchronized Dual-Laser Beams for Detection Range Enhancement.基于同步双激光束的用于增强探测范围的微机电系统(MEMS)激光雷达新方案。
Sensors (Basel). 2024 Mar 15;24(6):1897. doi: 10.3390/s24061897.
10
The Impact of LiDAR Configuration on Goal-Based Navigation within a Deep Reinforcement Learning Framework.激光雷达配置对深度强化学习框架内基于目标的导航的影响
Sensors (Basel). 2023 Dec 9;23(24):9732. doi: 10.3390/s23249732.

引用本文的文献

1
Advances in Silicon-Based Integrated Lidar.基于硅的集成激光雷达的进展。
Sensors (Basel). 2023 Jun 26;23(13):5920. doi: 10.3390/s23135920.
2
A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of -Axis and -Axis Displacements with Nanometric Resolutions.一种基于光纤的色度色散探头,用于纳米分辨率同时测量 - 轴和 - 轴位移。
Sensors (Basel). 2022 Dec 21;23(1):51. doi: 10.3390/s23010051.

本文引用的文献

1
MEMS Mirrors for LiDAR: A review.用于激光雷达的微机电系统(MEMS)镜子:综述
Micromachines (Basel). 2020 Apr 27;11(5):456. doi: 10.3390/mi11050456.
2
High-Speed Focus Inspection System Using a Position-Sensitive Detector.使用位置敏感探测器的高速聚焦检测系统
Sensors (Basel). 2017 Dec 8;17(12):2842. doi: 10.3390/s17122842.
3
Mathematical Model and Calibration Procedure of a PSD Sensor Used in Local Positioning Systems.用于局部定位系统的PSD传感器的数学模型与校准程序
Sensors (Basel). 2016 Sep 15;16(9):1484. doi: 10.3390/s16091484.
4
Measuring relative-story displacement and local inclination angle using multiple position-sensitive detectors.使用多个位置敏感探测器测量相对故事位移和局部倾斜角。
Sensors (Basel). 2010;10(11):9687-97. doi: 10.3390/s101109687. Epub 2010 Nov 1.