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原子层沉积的二氧化钛薄膜。

Atomic Layer Deposited Ti O Thin Films.

作者信息

Manjunath K, Saraswat A, Samrat D, Rao C N R

机构信息

International Centre for Materials Science, New Chemistry Unit, School of Advanced Materials, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur P. O., Bengaluru, 560064, India.

出版信息

Chemphyschem. 2022 May 18;23(10):e202100910. doi: 10.1002/cphc.202100910. Epub 2022 Apr 20.

DOI:10.1002/cphc.202100910
PMID:35332645
Abstract

Ti O thin films have been prepared through atomic layer deposition and subjected to electrical resistivity measurements as a function of temperature. The as-prepared films were stable for up to three weeks. In Ti O thin films, the insulator-metal transition is observed at ∼80 K, with nearly 3-4 orders of magnitude change in resistivity. The anomalous increase in electrical resistivity in the films is in accordance with the two-band model. However, the energy interval between the bands depending on the crystallographic c/a ratio leads to a change in electrical resistivity as a function of temperature.

摘要

通过原子层沉积制备了二氧化钛薄膜,并对其进行了作为温度函数的电阻率测量。制备好的薄膜在长达三周的时间内是稳定的。在二氧化钛薄膜中,在约80K时观察到绝缘体-金属转变,电阻率变化近3-4个数量级。薄膜中电阻率的异常增加符合双带模型。然而,取决于晶体学c/a比的能带之间的能量间隔导致电阻率随温度变化。

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