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基于模式局域化效应的ΔE-Effect磁传感器建模与参数灵敏度改进

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect.

作者信息

Lyu Haoqi, Wang Zheng, Yang Wuhao, Xiong Xingyin, Liu Zhenxi, Zou Xudong

机构信息

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2022 Apr 26;13(5):674. doi: 10.3390/mi13050674.

DOI:10.3390/mi13050674
PMID:35630140
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9145385/
Abstract

A mode-localized ΔE-effect magnetic sensor model is established theoretically and numerically. Based on the designed weakly coupled resonators with multi-layer film structure, it is investigated how the ΔE-effect of the magnetostrictive film under the external magnetic field causes the stiffness perturbation of the coupled resonators to induce the mode localization effect. Using the amplitude ratio (AR) as the output in the mode-localized ΔE-effect magnetic sensor can improve the relative sensitivity by three orders of magnitude compared with the traditional frequency output, which has been verified by simulations based on the finite element method (FEM). In addition, the effects of material properties and geometric dimensions on sensor performance parameters, such as sensitivity, linear range, and static operating point are also analyzed and studied in detail, providing the theoretical basis for the design and optimization of the mode-localized ΔE-effect magnetic sensor in different application scenarios. By reasonably optimizing the key parameters of the weekly coupled resonators, a mode-localized ΔE-effect magnetic sensor with the sensitivity of 18 AR/mT and a linear range of 0.8 mT can be achieved.

摘要

从理论和数值上建立了一种模式局域化ΔE效应磁传感器模型。基于设计的具有多层膜结构的弱耦合谐振器，研究了外磁场下磁致伸缩薄膜的ΔE效应如何引起耦合谐振器的刚度扰动，从而产生模式局域化效应。在模式局域化ΔE效应磁传感器中使用幅度比（AR）作为输出，与传统的频率输出相比，相对灵敏度可提高三个数量级，这已通过基于有限元方法（FEM）的模拟得到验证。此外，还详细分析和研究了材料特性和几何尺寸对传感器性能参数（如灵敏度、线性范围和静态工作点）的影响，为不同应用场景下模式局域化ΔE效应磁传感器的设计和优化提供了理论依据。通过合理优化弱耦合谐振器的关键参数，可实现灵敏度为18 AR/mT、线性范围为0.8 mT的模式局域化ΔE效应磁传感器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/167b2b879ceb/micromachines-13-00674-g008a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/65f30aa04f01/micromachines-13-00674-g0A1.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/e54e15579444/micromachines-13-00674-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/8fcd27d5d52a/micromachines-13-00674-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/9554b811a73d/micromachines-13-00674-g004a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/e8d2cb7e8508/micromachines-13-00674-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/5be49ef29079/micromachines-13-00674-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/75b0466dd5ee/micromachines-13-00674-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/167b2b879ceb/micromachines-13-00674-g008a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/65f30aa04f01/micromachines-13-00674-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/2f35395c3135/micromachines-13-00674-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/e54e15579444/micromachines-13-00674-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/8fcd27d5d52a/micromachines-13-00674-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/9554b811a73d/micromachines-13-00674-g004a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/e8d2cb7e8508/micromachines-13-00674-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/5be49ef29079/micromachines-13-00674-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/75b0466dd5ee/micromachines-13-00674-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9124/9145385/167b2b879ceb/micromachines-13-00674-g008a.jpg

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