利用气溶胶辅助化学气相沉积法合成氧化铟微粒
Synthesis of indium oxide microparticles using aerosol assisted chemical vapour deposition.
作者信息
Alam Firoz, Lewis David J
机构信息
Department of Materials, The University of Manchester Oxford Road Manchester M13 9PL UK
Department of Chemistry, The University of Manchester Oxford Road Manchester M13 9PL UK.
出版信息
RSC Adv. 2020 Jun 11;10(38):22487-22490. doi: 10.1039/d0ra02678f. eCollection 2020 Jun 10.
Abstract
Microparticles of indium oxide (InO) are deposited on glass substrates at 500 °C using aerosol assisted chemical vapour deposition (AACVD). The structural, morphological and optical properties of the as-deposited particles are reported.
摘要
采用气溶胶辅助化学气相沉积（AACVD）法，在500℃下将氧化铟（InO）微粒沉积在玻璃基板上。报道了沉积态微粒的结构、形态和光学性质。
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