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迈向一次性低成本微流控芯片设备:通过紫外线/臭氧辅助热融合键合制造的异质聚合物微阀和微泵。

Toward a disposable low-cost LOC device: heterogeneous polymer micro valve and pump fabricated by UV/ozone-assisted thermal fusion bonding.

作者信息

Jung Wonjong, Uddin M Jalal, Namkoong Kak, Chung Wonseok, Kim Joon-Ho, Shim Joon S

机构信息

Healthcare Sensor Lab., Device Research Centre, Samsung Advanced Institute of Technology (SAIT), Samsung Electronics Co., Ltd. Suwon Gyeonggi-do 16678 Republic of Korea.

Bio-IT Convergence Lab., Department of Electronics and Convergence Engineering, Kwangwoon University Seoul 01897 Republic of Korea

出版信息

RSC Adv. 2020 Jul 29;10(47):28390-28396. doi: 10.1039/d0ra03830j. eCollection 2020 Jul 27.

Abstract

Herein, a heterogeneous polymer micro valve and pump with a polypropylene (PP) membrane was developed in a low-cost manner UV/ozone-assisted thermal fusion bonding. The proposed fabrication technique allowed for a geometrically selective bonding; consequently, the membrane was prevented from bonding with the valve seat of the diaphragm micro-valve, without patterning a protection layer or introducing an additional structure. The developed device withstands 480 kPa of static pressure and up to 350 kPa of a vibration pressure, providing sufficient bonding strength for microfluidic actuations. The fabricated micro valve and pump are fully characterized and compared with a poly(dimethylsiloxane) (PDMS) membrane glass device, showing comparable valving and pumping performance. As a result, the robust PP membrane micro valve and pump are simply implemented in a facile manner, and demonstrated excellent performance, which is highly desirable for mass production of disposable lab-on-a-chip (LOC) devices.

摘要

在此,通过紫外线/臭氧辅助热融合键合以低成本方式开发了一种带有聚丙烯(PP)膜的异质聚合物微阀和泵。所提出的制造技术允许进行几何选择性键合;因此,无需对保护层进行图案化或引入额外结构,就能防止膜与隔膜微阀的阀座键合。所开发的装置能够承受480 kPa的静压和高达350 kPa的振动压力,为微流体驱动提供了足够的键合强度。对制造的微阀和泵进行了全面表征,并与聚二甲基硅氧烷(PDMS)膜玻璃装置进行了比较,显示出相当的阀控和泵送性能。结果,坚固的PP膜微阀和泵以简便的方式得以简单实现,并展示出优异的性能,这对于一次性芯片实验室(LOC)装置的大规模生产非常理想。

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