Shu Quanlin, Hai Kuo, Huang Wen, Jiang Lili, Yuan Shenghao, Li Kailong, Sun Pengfei, Tian Dong, Zhang Yunfei
Appl Opt. 2022 Jan 20;61(3):691-698. doi: 10.1364/AO.441795.
Ultraprecision optical systems such as high-energy laser systems have very strict requirements for surface defects of optical components. Comet-shaped defects are common in magnetorheological finishing, which is one of the main ultraprecision manufacturing technologies. Computational fluid dynamics is used to simulate the pressure and velocity of the magnetorheological fluid in pits during magnetorheological finishing for the first time, to the best of our knowledge. The simulation model analyzes the distribution of velocity and pressure in the process of the formation of comet-shaped defects. After the simulation, magnetorheological polishing experiments were carried out on the fused quartz silica glass. The polishing experiments use the rotation speed and immersion depth of the polishing wheel to verify the velocity and pressure distribution in the simulation experiment. The polishing experiment results are consistent with the simulation results, which show that the high polishing speed will increase the depth of the defect, and the uneven velocity and pressure distribution at the pits make the pits evolve into comet-shaped defects. We explain the cause of comet-shaped defects from the perspective of material removal and provide an optimization method of process parameters for high-efficiency removal of comet-shaped defects.
