Kai Lin, Chen Caiyi, Lu Yu, Meng Yizhao, Liu Yi, Cheng Yang, Yang Qing, Hou Xun, Chen Feng
State Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an, China.
School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, China.
Front Chem. 2022 Aug 15;10:973570. doi: 10.3389/fchem.2022.973570. eCollection 2022.
The efficient fabrication of nanochannels on hard and brittle materials is a difficult task in the field of micro and nano processing. We have realized nanochannel arrays on silica with characteristic scales varying from 50-230 nm using a single femtosecond Bessel beam pulse of 515 nm. By characterizing the surface openings, we found that the characteristic scales of the nanopore openings are inextricably linked to the surface energy deposition effect. We achieved not only three asymmetric channel profiles by adjusting the laser-sample interaction region, but also high aspect ratio nanochannels with characteristic scales about 50 nm and aspect ratios over 100. These results on hard and brittle materials provide a broader platform and application scenarios for smart particle rectifiers, DNA molecular sequencing, biosensors, and nanofluidic devices, which are also more suitable for future practical applications due to their low cost, good durability, and high productivity.
在硬脆材料上高效制备纳米通道是微纳加工领域的一项艰巨任务。我们利用515nm的单个飞秒贝塞尔光束脉冲，在二氧化硅上实现了特征尺度从50 - 230nm不等的纳米通道阵列。通过对表面开口进行表征，我们发现纳米孔开口的特征尺度与表面能量沉积效应有着千丝万缕的联系。我们不仅通过调整激光与样品的相互作用区域实现了三种不对称通道轮廓，还实现了特征尺度约为50nm且纵横比超过100的高深宽比纳米通道。这些在硬脆材料上取得的成果为智能粒子整流器、DNA分子测序、生物传感器和纳米流体装置提供了更广阔的平台和应用场景，并且由于其低成本、良好的耐久性和高生产率，也更适合未来的实际应用。
