Lu Yu, Kai Lin, Yang Qing, Du Guangqing, Hou Xun, Chen Feng
State Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Nanomaterials (Basel). 2021 Dec 9;11(12):3340. doi: 10.3390/nano11123340.
Nano-structures have significant applications in many fields such as chip fabrications, nanorobotics, and solar cells. However, realizing nanoscale structures on hard and brittle materials is still challenging. In this paper, when processing the silica surface with a tightly focused Bessel beam, the smallest nanohole with ~20 nm diameter has been realized by precisely controlling the interior and superficial interaction of the silica material. An effective surface window assisted nano-drilling (SWAN) mechanism is proposed to explain the generation of such a deep subwavelength structure, which is supported by the simulation results of energy depositions.
纳米结构在许多领域都有重要应用，如芯片制造、纳米机器人技术和太阳能电池等。然而，在硬脆材料上实现纳米级结构仍然具有挑战性。在本文中，当用紧聚焦贝塞尔光束处理二氧化硅表面时，通过精确控制二氧化硅材料的内部和表面相互作用，实现了直径约20纳米的最小纳米孔。提出了一种有效的表面窗口辅助纳米钻孔（SWAN）机制来解释这种深亚波长结构的产生，能量沉积的模拟结果支持了这一机制。
