Song Yutong, Sun Meng, Wu Haoyu, Zhao Wanli, Wang Qi
College of Sciences, Northeastern University, Shenyang 110819, China.
Science and Technology on Electro-Optical Information Security Control Laboratory, Tianjin 300308, China.
Materials (Basel). 2022 Nov 3;15(21):7766. doi: 10.3390/ma15217766.
Temperature sensors have been widely applied in daily life and production, but little attention has been paid to the research on temperature sensors based on surface plasmon resonance (SPR) sensors. Therefore, an SPR temperature sensor with a triple structure of titanium dioxide (TiO) film, gold (Au) film, and TiO nanorods is proposed in this article. By optimizing the thickness and structure of TiO film and nanorods and Au film, it is found that the sensitivity of the SPR temperature sensor can achieve 6038.53 nm/RIU and the detection temperature sensitivity is -2.40 nm/°C. According to the results, the sensitivity of the optimized sensor is 77.81% higher than that of the sensor with pure Au film, which is attributed to the TiO(film)-Au-TiO(nanorods) structure. Moreover, there is a good linear correlation (greater than 0.99) between temperature and resonance wavelength in the range from 0 °C to 60 °C, which can ensure the detection resolution. The high sensitivity, FOM, and detection resolution indicate that the proposed SPR sensor has a promising application in temperature monitoring.
温度传感器已在日常生活和生产中得到广泛应用，但基于表面等离子体共振（SPR）传感器的温度传感器研究却很少受到关注。因此，本文提出了一种具有二氧化钛（TiO）薄膜、金（Au）薄膜和TiO纳米棒三重结构的SPR温度传感器。通过优化TiO薄膜和纳米棒以及Au薄膜的厚度和结构，发现该SPR温度传感器的灵敏度可达6038.53 nm/RIU，检测温度灵敏度为-2.40 nm/°C。结果表明，优化后的传感器灵敏度比纯Au薄膜传感器高77.81%，这归因于TiO（薄膜）-Au-TiO（纳米棒）结构。此外，在0°C至60°C范围内，温度与共振波长之间存在良好的线性相关性（大于0.99），这可以确保检测分辨率。高灵敏度、品质因数和检测分辨率表明，所提出的SPR传感器在温度监测方面具有广阔的应用前景。
