School of Physics, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, P. R. China.
Department of Chemistry, Northwestern University, Evanston, IL 60208.
Proc Natl Acad Sci U S A. 2023 Jan 17;120(3):e2216672120. doi: 10.1073/pnas.2216672120. Epub 2023 Jan 11.
Cost-effective fabrication of mechanically flexible low-power electronics is important for emerging applications including wearable electronics, artificial intelligence, and the Internet of Things. Here, solution-processed source-gated transistors (SGTs) with an unprecedented intrinsic gain of ~2,000, low saturation voltage of +0.8 ± 0.1 V, and a ~25.6 μW power consumption are realized using an indium oxide InO/InO:polyethylenimine (PEI) blend homojunction with Au contacts on Si/SiO. Kelvin probe force microscopy confirms source-controlled operation of the SGT and reveals that PEI doping leads to more effective depletion of the reverse-biased Schottky contact source region. Furthermore, using a fluoride-doped AlO gate dielectric, rigid (on a Si substrate) and flexible (on a polyimide substrate) SGTs were fabricated. These devices exhibit a low driving voltage of +2 V and power consumption of ~11.5 μW, yielding inverters with an outstanding voltage gain of >5,000. Furthermore, electrooculographic (EOG) signal monitoring can now be demonstrated using an SGT inverter, where a ~1.0 mV EOG signal is amplified to over 300 mV, indicating significant potential for applications in wearable medical sensing and human-computer interfacing.
具有空前的 2000 左右固有增益、+0.8 ± 0.1 V 低饱和电压和 25.6 μW 左右功耗的溶液处理源栅晶体管(SGT),利用金接触的氧化铟/聚乙烯亚胺(PEI)共混同结在 Si/SiO 上实现。开尔文探针力显微镜证实了 SGT 的源控制操作,并揭示了 PEI 掺杂导致反向偏置肖特基接触源区更有效的耗尽。此外,使用氟掺杂的 AlO 栅介质,制造了刚性(在硅衬底上)和柔性(在聚酰亚胺衬底上)的 SGT。这些器件表现出低的驱动电压+2 V 和 11.5 μW 左右的功耗,产生了超过 5000 的出色电压增益的反相器。此外,现在可以使用 SGT 反相器演示眼电图(EOG)信号监测,其中 1.0 mV 的 EOG 信号被放大到 300 mV 以上,这表明在可穿戴医疗传感和人机接口应用中有很大的潜力。