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通过溶液处理的金属氧化物同质结实现的高性能、低功耗源栅晶体管。

High-performance and low-power source-gated transistors enabled by a solution-processed metal oxide homojunction.

机构信息

School of Physics, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, P. R. China.

Department of Chemistry, Northwestern University, Evanston, IL 60208.

出版信息

Proc Natl Acad Sci U S A. 2023 Jan 17;120(3):e2216672120. doi: 10.1073/pnas.2216672120. Epub 2023 Jan 11.

DOI:10.1073/pnas.2216672120
PMID:36630451
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9934017/
Abstract

Cost-effective fabrication of mechanically flexible low-power electronics is important for emerging applications including wearable electronics, artificial intelligence, and the Internet of Things. Here, solution-processed source-gated transistors (SGTs) with an unprecedented intrinsic gain of ~2,000, low saturation voltage of +0.8 ± 0.1 V, and a ~25.6 μW power consumption are realized using an indium oxide InO/InO:polyethylenimine (PEI) blend homojunction with Au contacts on Si/SiO. Kelvin probe force microscopy confirms source-controlled operation of the SGT and reveals that PEI doping leads to more effective depletion of the reverse-biased Schottky contact source region. Furthermore, using a fluoride-doped AlO gate dielectric, rigid (on a Si substrate) and flexible (on a polyimide substrate) SGTs were fabricated. These devices exhibit a low driving voltage of +2 V and power consumption of ~11.5 μW, yielding inverters with an outstanding voltage gain of >5,000. Furthermore, electrooculographic (EOG) signal monitoring can now be demonstrated using an SGT inverter, where a ~1.0 mV EOG signal is amplified to over 300 mV, indicating significant potential for applications in wearable medical sensing and human-computer interfacing.

摘要

具有空前的 2000 左右固有增益、+0.8 ± 0.1 V 低饱和电压和 25.6 μW 左右功耗的溶液处理源栅晶体管(SGT),利用金接触的氧化铟/聚乙烯亚胺(PEI)共混同结在 Si/SiO 上实现。开尔文探针力显微镜证实了 SGT 的源控制操作,并揭示了 PEI 掺杂导致反向偏置肖特基接触源区更有效的耗尽。此外,使用氟掺杂的 AlO 栅介质,制造了刚性(在硅衬底上)和柔性(在聚酰亚胺衬底上)的 SGT。这些器件表现出低的驱动电压+2 V 和 11.5 μW 左右的功耗,产生了超过 5000 的出色电压增益的反相器。此外,现在可以使用 SGT 反相器演示眼电图(EOG)信号监测,其中 1.0 mV 的 EOG 信号被放大到 300 mV 以上,这表明在可穿戴医疗传感和人机接口应用中有很大的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/1074aeec188d/pnas.2216672120fig04.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/e8c59ca84c28/pnas.2216672120fig01.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/1db2a1d5360e/pnas.2216672120fig02.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/14f1db18d240/pnas.2216672120fig03.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/1074aeec188d/pnas.2216672120fig04.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/e8c59ca84c28/pnas.2216672120fig01.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/1db2a1d5360e/pnas.2216672120fig02.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/14f1db18d240/pnas.2216672120fig03.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9c3e/9934017/1074aeec188d/pnas.2216672120fig04.jpg

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