Xu Xiaobin, Liu Zixuan, Wang Liqiang, Huang Yifei, Yang He
School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.
Department of Ophthalmology, Chinese PLA General Hospital, Medical School of Chinese PLA, Beijing 100853, China.
Micromachines (Basel). 2023 Jan 31;14(2):353. doi: 10.3390/mi14020353.
Intraocular pressure (IOP) is a key indicator to evaluate the risk and status of glaucoma, which is one of the main causes of irreversible blindness. However, the IOP value is susceptible to circadian changes and is difficult to be measured real-time. In this paper, we designed a thin-film integrated optical IOP sensor based on the interferometry principle, which could read out the IOP value by interference patterns and monitor the value changes real-time at the same time. The theoretical and experimental results indicated that our sensor exhibited a sensitivity of 0.19 μm/mmHg and an average accuracy of 0.84 mmHg over the pressure range of 0-45 mmHg, which is comparable with the other reported optical systems but with the advantage of easier fabrication process and low-cost. Our sensor device implies great potential in the application of human physiological index measurement and other chip-integrated medical sensing instruments.
眼压（IOP）是评估青光眼风险和状况的关键指标，青光眼是不可逆失明的主要原因之一。然而，眼压值易受昼夜变化影响，且难以实时测量。在本文中，我们基于干涉测量原理设计了一种薄膜集成光学眼压传感器，该传感器可通过干涉图样读出眼压值，并同时实时监测其值的变化。理论和实验结果表明，我们的传感器在0 - 45 mmHg的压力范围内灵敏度为0.19μm/mmHg，平均精度为0.84 mmHg，与其他已报道的光学系统相当，但具有制造工艺更简单、成本更低的优势。我们的传感器装置在人体生理指标测量及其他芯片集成医疗传感仪器的应用中具有巨大潜力。
