Zhang Chenghao, Liu Zhichao, Li Chun, Cao Jian, Buijnsters Josephus G
State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China.
Department of Precision and Microsystems Engineering, Faculty of Mechanical, Maritime and Materials Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands.
Nanomaterials (Basel). 2023 Feb 27;13(5):888. doi: 10.3390/nano13050888.
Diamond nanostructures are mostly produced from bulk diamond (single- or polycrystalline) by using time-consuming and/or costly subtractive manufacturing methods. In this study, we report the bottom-up synthesis of ordered diamond nanopillar arrays by using porous anodic aluminium oxide (AAO). Commercial ultrathin AAO membranes were adopted as the growth template in a straightforward, three-step fabrication process involving chemical vapor deposition (CVD) and the transfer and removal of the alumina foils. Two types of AAO membranes with distinct nominal pore size were employed and transferred onto the nucleation side of CVD diamond sheets. Subsequently, diamond nanopillars were grown directly on these sheets. After removal of the AAO template by chemical etching, ordered arrays of submicron and nanoscale diamond pillars with ~325 nm and ~85 nm diameters were successfully released.
金刚石纳米结构大多通过耗时且/或昂贵的减法制造方法由块状金刚石（单晶或多晶）制备而成。在本研究中，我们报道了利用多孔阳极氧化铝（AAO）自下而上合成有序金刚石纳米柱阵列。在一个直接的三步制造过程中，采用商用超薄AAO膜作为生长模板，该过程涉及化学气相沉积（CVD）以及氧化铝箔的转移和去除。使用了两种具有不同标称孔径的AAO膜，并将其转移到CVD金刚石片的成核面上。随后，金刚石纳米柱直接在这些片上生长。通过化学蚀刻去除AAO模板后，成功释放出直径约为325 nm和85 nm的亚微米和纳米级金刚石柱有序阵列。
