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单晶硅和纳米晶金刚石中的铒发光中心——离子注入通量和热退火的影响

Erbium Luminescence Centres in Single- and Nano-Crystalline Diamond-Effects of Ion Implantation Fluence and Thermal Annealing.

作者信息

Cajzl Jakub, Nekvindová Pavla, Macková Anna, Malinský Petr, Oswald Jiří, Remeš Zdeněk, Varga Marián, Kromka Alexander, Akhetova Banu, Böttger Roman, Prajzler Václav

机构信息

Department of Inorganic Chemistry, University of Chemistry and Technology, Technická 5, 166 28 Prague, Czech Republic.

Nuclear Physics Institute, Academy of Sciences of the Czech Republic, v.v.i., 250 68 Řež, Czech Republic.

出版信息

Micromachines (Basel). 2018 Jun 22;9(7):316. doi: 10.3390/mi9070316.

DOI:10.3390/mi9070316
PMID:30424249
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6082296/
Abstract

We present a fundamental study of the erbium luminescence centres in single- and nano-crystalline (NCD) diamonds. Both diamond forms were doped with Er using ion implantation with the energy of 190 keV at fluences up to 5 × 10 ions·cm, followed by annealing at controllable temperature in Ar atmosphere or vacuum to enhance the near infrared photoluminescence. The Rutherford Backscattering Spectrometry showed that Er concentration maximum determined for NCD films is slightly shifted to the depth with respect to the Stopping and Range of Ions in Matter simulation. The number of the displaced atoms per depth slightly increased with the fluence, but in fact the maximum reached the fully disordered target even in the lowest ion fluence used. The post-implantation annealing at 800 °C in vacuum had a further beneficial effect on erbium luminescence intensity at around 1.5 μm, especially for the Er-doped NCD films, which contain a higher amount of grain boundaries than single-crystalline diamond.

摘要

我们展示了对单晶和纳米晶(NCD)金刚石中铒发光中心的基础研究。两种金刚石形式都通过能量为190 keV、通量高达5×10离子·cm的离子注入进行铒掺杂,随后在可控温度下于氩气气氛或真空中退火,以增强近红外光致发光。卢瑟福背散射光谱表明,相对于物质中离子的阻止和射程模拟,NCD薄膜确定的铒浓度最大值向深度略有偏移。每深度处的位移原子数随通量略有增加,但实际上即使在使用的最低离子通量下,最大值也达到了完全无序的靶材。在真空中800°C进行的注入后退火对1.5μm左右的铒发光强度有进一步的有益影响,特别是对于掺铒的NCD薄膜,其比单晶金刚石含有更多的晶界。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/914299fc8e32/micromachines-09-00316-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/a52154051830/micromachines-09-00316-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/31fdffc2daf7/micromachines-09-00316-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/ed5748d9cd08/micromachines-09-00316-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/914299fc8e32/micromachines-09-00316-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/a52154051830/micromachines-09-00316-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/31fdffc2daf7/micromachines-09-00316-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/ed5748d9cd08/micromachines-09-00316-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/231c/6082296/914299fc8e32/micromachines-09-00316-g004.jpg

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Nat Commun. 2017 May 26;8:15376. doi: 10.1038/ncomms15376.
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Erbium ion implantation into diamond - measurement and modelling of the crystal structure.铒离子注入金刚石——晶体结构的测量与建模
Phys Chem Chem Phys. 2017 Feb 22;19(8):6233-6245. doi: 10.1039/c6cp08851a.
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