Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland.
Center for Quantum Science and Engineering, EPFL, Lausanne, Switzerland.
Nature. 2023 Mar;615(7952):411-417. doi: 10.1038/s41586-023-05724-2. Epub 2023 Mar 15.
Early works and recent advances in thin-film lithium niobate (LiNbO) on insulator have enabled low-loss photonic integrated circuits, modulators with improved half-wave voltage, electro-optic frequency combs and on-chip electro-optic devices, with applications ranging from microwave photonics to microwave-to-optical quantum interfaces. Although recent advances have demonstrated tunable integrated lasers based on LiNbO (refs. ), the full potential of this platform to demonstrate frequency-agile, narrow-linewidth integrated lasers has not been achieved. Here we report such a laser with a fast tuning rate based on a hybrid silicon nitride (SiN)-LiNbO photonic platform and demonstrate its use for coherent laser ranging. Our platform is based on heterogeneous integration of ultralow-loss SiN photonic integrated circuits with thin-film LiNbO through direct bonding at the wafer level, in contrast to previously demonstrated chiplet-level integration, featuring low propagation loss of 8.5 decibels per metre, enabling narrow-linewidth lasing (intrinsic linewidth of 3 kilohertz) by self-injection locking to a laser diode. The hybrid mode of the resonator allows electro-optic laser frequency tuning at a speed of 12 × 10 hertz per second with high linearity and low hysteresis while retaining the narrow linewidth. Using a hybrid integrated laser, we perform a proof-of-concept coherent optical ranging (FMCW LiDAR) experiment. Endowing SiN photonic integrated circuits with LiNbO creates a platform that combines the individual advantages of thin-film LiNbO with those of SiN, which show precise lithographic control, mature manufacturing and ultralow loss.
早期的薄膜铌酸锂(LiNbO)在绝缘体上的工作和近期的进展使低损耗光子集成电路、具有改进的半波电压的调制器、电光频率梳和片上电光器件成为可能,其应用范围从微波光子学到微波到光量子接口。尽管最近的进展已经证明了基于 LiNbO 的可调谐集成激光器(参考文献),但该平台实现频率灵活、窄线宽集成激光器的全部潜力尚未实现。在这里,我们报告了一种基于混合氮化硅(SiN)-LiNbO 光子平台的具有快速调谐速率的此类激光器,并展示了其在相干激光测距中的应用。我们的平台基于通过晶圆级直接键合将超低损耗 SiN 光子集成电路与薄膜 LiNbO 异质集成,与之前展示的芯片级集成形成对比,其具有 8.5 分贝/米的低传播损耗,通过自注入锁定到激光二极管实现窄线宽激光(固有线宽为 3 千赫兹)。谐振器的混合模式允许以 12×10 赫兹/秒的速度进行电光激光频率调谐,具有高线性度和低滞后,同时保持窄线宽。使用混合集成激光器,我们进行了相干光学测距(FMCW LiDAR)实验的概念验证。将 LiNbO 赋予 SiN 光子集成电路,创建了一个平台,该平台结合了薄膜 LiNbO 的各个优势和 SiN 的优势,SiN 具有精确的光刻控制、成熟的制造工艺和超低损耗。