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1064纳米广角去偏振反射镜的研制

Development of Wide-Angle Depolarizing Reflector at 1064 nm.

作者信息

Zhu Han, Jiang Hongyan, Guo Kai, Peng Yongchao, Xin Yawu, Zhang Gong, Lin Yixin, Yang Ning, Wei Huashu, Huang Zekai, Xiong Shifu, Hu Zhanggui

机构信息

Tianjin Key Laboratory of Functional Crystal Materials, Institute of Functional Crystals, Tianjin University of Technology, Tianjin 300384, China.

National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150080, China.

出版信息

Materials (Basel). 2023 Jun 8;16(12):4258. doi: 10.3390/ma16124258.

Abstract

Optical coherence tomography is a new promising chromatographic imaging technique with the advantages of noncontact and high resolution without damage, which is widely used in the field of biological tissue detection and imaging. As an important optical element in the system, the wide-angle depolarizing reflector plays a key role in the accurate acquisition of optical signals. TaO and SiO are selected as the coating materials for the technical parameter requirements of the reflector in the system. Based on the basic theory of optical thin film and combined with MATLAB and OptiLayer software, the design of 0~60° incident 1064 ± 40 nm depolarizing reflective film is realized by establishing the evaluation function of the film system. To optimize the oxygen-charging distribution scheme during film deposition, the weak absorption properties of the film materials are characterized by optical thermal co-circuit interferometry. According to the sensitivity distribution of the film layer, the optical control monitoring scheme with a thickness error of less than 1% is designed rationally. "Crystal control + optical control" is used to precisely control the thickness of each film layer and complete the preparation of resonant cavity film. The measurement results show that the average reflectance is more than 99.5%, and the deviation of P-light and S-light is less than 1% in the 1064 ± 40 nm wavelength band range from 0° to 60°, which meets the requirements of optical coherence tomography system.

摘要

光学相干断层扫描是一种新兴且有前景的层析成像技术,具有非接触、高分辨率且无损伤的优点,广泛应用于生物组织检测与成像领域。作为系统中的重要光学元件,广角消偏反射镜在光信号的准确采集方面起着关键作用。根据系统中反射镜的技术参数要求,选择TaO和SiO作为镀膜材料。基于光学薄膜的基本理论,结合MATLAB和OptiLayer软件,通过建立膜系评价函数实现了0~60°入射、1064±40nm消偏反射膜的设计。为优化镀膜过程中的充氧分布方案,采用光热共路干涉法表征膜材料的弱吸收特性。根据膜层的灵敏度分布,合理设计了厚度误差小于1%的光学控制监测方案。采用“晶控+光控”精确控制各膜层厚度,完成谐振腔薄膜的制备。测量结果表明,在0°至60°的1064±40nm波长范围内,平均反射率大于99.5%,P光和S光的偏差小于1%,满足光学相干断层扫描系统的要求。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3247/10303084/83e4476bed7a/materials-16-04258-g001.jpg

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