Zhang Wei, Shrestha Sagar, Parajuli Sajjan, Maskey Bijendra Bishow, Park Jinhwa, Yang Hao, Jung Younsu, Cho Gyoujin
Department of Biophysics, Institute of Quantum Biophysics, Research Engineering Center for R2R-Printed Flexible Computer, Sungkyunkwan University Suwon-si 16419 Republic of Korea
Department of Intelligent Healthcare Convergence, Sungkyunkwan University Suwon-si 16419 Republic of Korea.
Nanoscale Adv. 2023 Jun 6;5(15):3879-3886. doi: 10.1039/d3na00286a. eCollection 2023 Jul 25.
Charge carrier polarity tuning in printed thin film transistors (TFTs) is a crucial step in order to obtain complementary printed devices. In this work, we studied the effect of an AlO passivation layer on printed single-walled carbon nanotube (SWCNT) based TFTs to tune the charge carrier polarity. By varying the atomic layer deposition (ALD) temperature and AlO layer thickness, we can tune the doping degree of AlO to tailor the polarity of printed SWCNT-based TFTs (SWCNT-TFTs). The precise control of threshold voltage () and polarity from p-type to well-balanced ambipolar, and n-type SWCNT-TFTs is successfully demonstrated with high repeatability by optimizing the ALD temperature and AlO layer thickness based on 20 printed samples per test. As a proof-of-concept, inverter logic circuits using the SWCNT-TFT with different polarity types are demonstrated. The ambipolar device-based inverter exhibits a voltage gain of 3.9 and the CMOS-based inverter exhibits a gain of approximately 4.3, which is comparable to the current roll-to-roll (R2R) printed inverter circuits. Different thicknesses of AlO layer, coated by the ALD at different temperatures and thicknesses, provide a deep understanding of the device fabrication and control process to implement the tailored doping method to efficiently realize R2R printed SWCNT-TFT-based complementary electronic devices.
为了获得互补型印刷器件,在印刷薄膜晶体管(TFT)中进行载流子极性调谐是关键的一步。在这项工作中,我们研究了AlO钝化层对基于印刷单壁碳纳米管(SWCNT)的TFT的影响,以调谐载流子极性。通过改变原子层沉积(ALD)温度和AlO层厚度,我们可以调整AlO的掺杂程度,从而定制基于印刷SWCNT的TFT(SWCNT-TFT)的极性。基于每次测试20个印刷样品,通过优化ALD温度和AlO层厚度,成功地以高重复性精确控制了阈值电压()以及从p型到平衡双极性和n型SWCNT-TFT的极性。作为概念验证,展示了使用不同极性类型的SWCNT-TFT的反相器逻辑电路。基于双极性器件的反相器电压增益为3.9,基于CMOS的反相器增益约为4.3,这与当前的卷对卷(R2R)印刷反相器电路相当。在不同温度和厚度下通过ALD涂覆的不同厚度的AlO层,为实现定制掺杂方法以有效实现基于R2R印刷SWCNT-TFT的互补电子器件的器件制造和控制过程提供了深入理解。