Tan Xin, He Zhanqing, Li Wenbin, Yang Qiao, Wang Jian, Cang Lei, Du Yanlong, Qi Hui
School of Mechanical Engineering, Inner Mongolia University of Science & Technology, Baotou PR 014010, China.
Inner Mongolia Key Laboratory of Intelligent Diagnosis and Control of Mechatronic System, Baotou PR 014010, China.
ACS Omega. 2024 Jun 12;9(25):27492-27498. doi: 10.1021/acsomega.4c02618. eCollection 2024 Jun 25.
Diamond nanopillar arrays can enhance the fluorescence collection of diamond color centers, playing a crucial role in quantum communication and quantum sensing. In this paper, the preparation of diamond nanopillar arrays was realized by the processes of polystyrene (PS) sphere array film preparation, PS sphere etching shrinkage control, tilted magnetron sputtering of copper film, and oxygen plasma etching. Closely aligned PS sphere array films were prepared on the diamond surface by the gas-liquid interfacial method, and the effects of ethanol and dodecamethylacrylic acid solutions on the formation of the array films were discussed. Controllable reduction of PS sphere diameter is realized by the oxygen plasma etching process, and the changes of the PS sphere array film under the influence of etching power, bias power, and etching time are discussed. Copper antietching films were prepared at the top of arrayed PS spheres by the tilted magnetron sputtering method, and the antietching effect of copper films with different thicknesses was explored. Diamond nanopillar arrays were prepared by oxygen plasma etching, and the effects of etching under different process parameters were discussed. The prepared diamond nanopillars were in hexagonal close-rowed arrays with a spacing of 800 nm and an average diameter of 404 nm, and the spacing, diameter, and height could be parametrically regulated. Raman spectroscopy and photoluminescence spectroscopy detection revealed that the prepared diamond nanopillar array still maintains polycrystalline diamond properties, with only a small amount of the graphite phase appearing. Moreover, the prepared diamond nanopillar array can enhance the photoluminescence of diamond color centers by approximately 2 times. The fabrication method of diamond nanopillar array structures described in this article lays the foundation for quantum sensing technology based on diamond nanostructures.
金刚石纳米柱阵列可以增强金刚石色心的荧光收集，在量子通信和量子传感中发挥着关键作用。本文通过聚苯乙烯（PS）球阵列薄膜制备、PS球蚀刻收缩控制、铜膜倾斜磁控溅射和氧等离子体蚀刻等工艺实现了金刚石纳米柱阵列的制备。采用气液界面法在金刚石表面制备了紧密排列的PS球阵列薄膜，并讨论了乙醇和十二甲基丙烯酸溶液对阵列薄膜形成的影响。通过氧等离子体蚀刻工艺实现了PS球直径的可控减小，并讨论了蚀刻功率、偏置功率和蚀刻时间影响下PS球阵列薄膜的变化。采用倾斜磁控溅射法在排列好的PS球顶部制备了铜抗蚀刻薄膜，并探索了不同厚度铜膜的抗蚀刻效果。通过氧等离子体蚀刻制备了金刚石纳米柱阵列，并讨论了不同工艺参数下的蚀刻效果。制备的金刚石纳米柱呈六方密排阵列，间距为800 nm，平均直径为404 nm，间距、直径和高度均可参数化调节。拉曼光谱和光致发光光谱检测表明，制备的金刚石纳米柱阵列仍保持多晶金刚石特性，仅出现少量石墨相。此外，制备的金刚石纳米柱阵列可将金刚石色心的光致发光增强约2倍。本文所述的金刚石纳米柱阵列结构的制备方法为基于金刚石纳米结构的量子传感技术奠定了基础。
