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具有超低亚阈值摆幅和高反相器信号增益的全印刷负电容场效应晶体管。

Fully Printed Negative-Capacitance Field-Effect Transistors with Ultralow Subthreshold Swing and High Inverter Signal Gain.

作者信息

Pradhan Jyoti Ranjan, Dasgupta Subho

机构信息

Department of Materials Engineering, Indian Institute of Science (IISc), C V Raman Avenue, Bangalore 560012, Karnataka, India.

出版信息

ACS Appl Mater Interfaces. 2024 Jul 31;16(30):39517-39527. doi: 10.1021/acsami.4c00548. Epub 2024 Jul 16.

Abstract

The switching of conventional field-effect transistors (FETs) is limited by the Boltzmann barrier of thermionic emission, which prevents the realization of low-power electronics. In order to overcome this limitation, among others, unconventional device geometry with a ferroelectric/dielectric insulator stack has been proposed to demonstrate stable negative-capacitance behavior. Here, the switching of the ferroelectric layer behaves like a step-up amplifier and results in a body factor less than 1. This implies a larger change in the semiconductor surface potential compared to the applied gate voltage variation. The transistors with such ferroelectric/dielectric stack are known as negative-capacitance field-effect transistors (nc-FETs), and can demonstrate a subthreshold slope lower than the Boltzmann's limit (60 mV/decade). While nc-FETs have typically been realized with high-vacuum-deposition processes, here we show fully printed nc-FETs with amorphous indium-gallium-zinc oxide (a-IGZO) as the semiconductor material, AlO as the dielectric, and poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) as the polymer ferroelectric. The printed nc-FETs demonstrate an extremely low subthreshold slope of ∼2.3 mV/decade at room temperature, which remains below the Boltzmann's limit for over 5 orders of magnitude of drain currents. Furthermore, the unipolar depletion-load-type inverters fabricated using n-type nc-FETs have demonstrated an extraordinary signal gain of 2691.

摘要

传统场效应晶体管(FET)的开关速度受热电子发射的玻尔兹曼势垒限制,这阻碍了低功耗电子器件的实现。为了克服这一限制,人们提出了采用铁电/介电绝缘体堆叠的非常规器件几何结构,以展现稳定的负电容行为。在此,铁电层的开关行为类似于升压放大器,导致体因子小于1。这意味着与施加的栅极电压变化相比,半导体表面电势的变化更大。具有这种铁电/介电堆叠的晶体管被称为负电容场效应晶体管(nc-FET),并且可以展现出低于玻尔兹曼极限(60 mV/十倍频程)的亚阈值斜率。虽然nc-FET通常通过高真空沉积工艺实现,但在此我们展示了以非晶铟镓锌氧化物(a-IGZO)作为半导体材料、AlO作为电介质、聚(偏二氟乙烯-三氟乙烯)(PVDF-TrFE)作为聚合物铁电体的全印刷nc-FET。这些印刷nc-FET在室温下展现出极低的亚阈值斜率,约为2.3 mV/十倍频程,在超过5个数量级的漏极电流范围内仍低于玻尔兹曼极限。此外,使用n型nc-FET制造的单极耗尽负载型逆变器展现出高达2691的非凡信号增益。

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