Xiong Juan, Xie Xintong, Wei Jie, Sun Shuxiang, Luo Xiaorong
Henan Key Laboratory of Smart Lighting, School of Information Engineering, Huanghuai University, Zhumadian 463000, China.
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China.
Micromachines (Basel). 2024 Sep 16;15(9):1158. doi: 10.3390/mi15091158.
In this paper, a novel AlGaN/GaN HEMT structure with a P-GaN buried layer in the buffer layer and a locally doped barrier layer under the gate (PN-HEMT) is proposed to enhance its resistance to single event transient (SET) effects while also overcoming the degradation of other characteristics. The device operation mechanism and characteristics are investigated by TCAD simulation. The results show that the peak electric field and impact ionization at the gate edges are reduced in the PN-HEMT due to the introduced P-GaN buried layer in the buffer layer. This leads to a decrease in the peak drain current () induced by the SET effect and an improvement in the breakdown voltage (BV). Additionally, the locally doped barrier layer provides extra electrons to the channel, resulting in higher saturated drain current () and maximum transconductance (). The of the PN-HEMT (1.37 A/mm) is 71.8% lower than that of the conventional AlGaN/GaN HEMT (C-HEMT) (4.85 A/mm) at 0.6 pC/µm. Simultaneously, and BV are increased by 21.2% and 63.9%, respectively. Therefore, the PN-HEMT enhances the hardened SET effect of the device without sacrificing other key characteristics of the AlGaN/GaN HEMT.
本文提出了一种新型的AlGaN/GaN高电子迁移率晶体管(HEMT)结构,即在缓冲层中设置P-GaN埋层,并在栅极下方设置局部掺杂的势垒层(PN-HEMT),以增强其对单粒子瞬态(SET)效应的抗性,同时克服其他特性的退化。通过TCAD模拟研究了该器件的工作机制和特性。结果表明,由于在缓冲层中引入了P-GaN埋层,PN-HEMT中栅极边缘的峰值电场和碰撞电离降低。这导致SET效应引起的峰值漏极电流()减小,击穿电压(BV)提高。此外,局部掺杂的势垒层为沟道提供了额外的电子,从而导致更高的饱和漏极电流()和最大跨导()。在0.6 pC/µm时,PN-HEMT的(1.37 A/mm)比传统AlGaN/GaN HEMT(C-HEMT)(4.85 A/mm)低71.8%。同时,和BV分别提高了21.2%和63.9%。因此,PN-HEMT在不牺牲AlGaN/GaN HEMT其他关键特性的情况下增强了器件的抗SET效应能力。