Sun Shuxiang, Liu Lulu, Qu Gangchuan, Xie Xintong, Ajayan J
Zhumadian Key Laboratory of Novel Semiconductor Devices and Reliability, Huanghuai University, Zhumadian 463000, China.
School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
Micromachines (Basel). 2025 Jun 30;16(7):779. doi: 10.3390/mi16070779.
To enhance the DC and RF performance of AlGaN/GaN HEMTs, a novel device structure was proposed and investigated through simulation. The key innovation of this new structure lies in the incorporation of an AlInGaN back-barrier layer and an N-type locally doped AlGaN barrier layer (BD-HEMT), based on conventional device architecture. The AlInGaN back-barrier layer effectively confines electrons within the channel, thereby increasing the electron concentration. Simultaneously, the N-type locally doped AlGaN barrier layer introduced beneath the gate supplies additional electrons to the channel, further enhancing the electron density. These modifications collectively lead to improved DC and RF characteristics of the device. Compared to the conventional AlGaN/GaN HEMT, BD-HEMT achieves a 24.8% increase in saturation drain current and a 10.4% improvement in maximum transconductance. Furthermore, the maximum cutoff frequency and maximum oscillation frequency are enhanced by 14.8% and 21.2%, respectively.