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在铂-二硒化钨-铂场效应晶体管中插入h-氮化铝单层间隔层的影响。

Effects of insertion of an h-AlN monolayer spacer in Pt-WSe-Pt field-effect transistors.

作者信息

Lin Ken-Ming, Chen Po-Jiun, Chuu Chih-Piao, Chen Yu-Chang

机构信息

Department of Electrophysics, National Yang Ming Chiao Tung University, 1001 University Road, Hsinchu City, 300093, Taiwan.

Taiwan Semiconductor Manufacturing Company (TSMC), Hsinchu, 30010, Taiwan.

出版信息

Sci Rep. 2024 Oct 14;14(1):24019. doi: 10.1038/s41598-024-74691-z.

DOI:10.1038/s41598-024-74691-z
PMID:39402144
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11479288/
Abstract

The growth of two-dimensional hexagonal aluminum nitride (h-AlN) on transition metal dichalcogenide (TMD) monolayers exhibits superior uniformity and smoothness compared to HfO on silicon substrate. This makes an h-AlN monolayer an ideal spacer between the gate oxide material and the WSe monolayer in a two-dimensional field effect transistor (FET). From first principles approaches, we calculate and compare the transmission functions and current densities of Pt-WSe-Pt nanojunctions without and with the insertion of an h-AlN monolayer as a spacer in the gate architecture. The inclusion of h-AlN can alter the characteristics of the Pt-WSe-Pt FET in response to the gate voltage ( ). The FET without (or with) h-AlN exhibits the characteristics of a P-type (or bipolar) transistor: an on/off ratio of around (or ); and an average subthreshold swing (S.S.) of approximately 109 mV/ (or 112 mV/ ), respectively. We observe that shifts the profile of the transmission function by an energy of , where represents the gate-controlling efficiency. We observed that and , corresponding to whether the Fermi energy is located inside or outside the band gap. Therefore, we construct an effective gate model based on the Landauer formula, with the transmission function at as the baseline. Our model generates results that are consistent with those obtained through first principles calculations. The relative error in current densities between model and first-principles calculations is within . The 2D atomistic FETs show excellent device specifications and the ability to compete with existing transistors based on traditional silicon technology. Our findings could help advance the design of TMD-based FETs.

摘要

与在硅衬底上生长HfO相比,在过渡金属二硫属化物(TMD)单层上生长二维六方氮化铝(h - AlN)表现出更高的均匀性和平滑度。这使得h - AlN单层成为二维场效应晶体管(FET)中栅极氧化物材料与WSe单层之间的理想间隔层。从第一性原理方法出发,我们计算并比较了在栅极结构中有无插入h - AlN单层作为间隔层的Pt - WSe - Pt纳米结的传输函数和电流密度。h - AlN的加入可以改变Pt - WSe - Pt FET响应栅极电压( )的特性。不含(或含有)h - AlN的FET分别表现出P型(或双极型)晶体管的特性:开/关比约为 (或 );平均亚阈值摆幅(S.S.)分别约为109 mV/ (或112 mV/ )。我们观察到 使传输函数的轮廓在能量上偏移了 ,其中 表示栅极控制效率。我们观察到 和 ,这对应于费米能量是位于带隙内还是带隙外。因此,我们基于朗道尔公式构建了一个有效的栅极模型,以 处的传输函数为基线。我们的模型生成的结果与通过第一性原理计算得到的结果一致。模型与第一性原理计算之间电流密度的相对误差在 以内。二维原子FET显示出优异的器件规格以及与基于传统硅技术的现有晶体管竞争的能力。我们的发现有助于推进基于TMD的FET的设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/d2db3620f959/41598_2024_74691_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/990159c03c83/41598_2024_74691_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/b08f20a15b1b/41598_2024_74691_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/c1631daf0c04/41598_2024_74691_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/fa0216c45973/41598_2024_74691_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/8cda7b265871/41598_2024_74691_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/b023d2fcd733/41598_2024_74691_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/d2db3620f959/41598_2024_74691_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/990159c03c83/41598_2024_74691_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/b08f20a15b1b/41598_2024_74691_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/c1631daf0c04/41598_2024_74691_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/fa0216c45973/41598_2024_74691_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/8cda7b265871/41598_2024_74691_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/b023d2fcd733/41598_2024_74691_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/78ea/11479288/d2db3620f959/41598_2024_74691_Fig7_HTML.jpg

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