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铁电薄膜中的超低压驱动极化切换

Ultralow-pressure-driven polarization switching in ferroelectric membranes.

作者信息

Yang Xinrui, Han Lu, Ning Hongkai, Xu Shaoqing, Hao Bo, Li Yi-Chi, Li Taotao, Gao Yuan, Yan Shengjun, Li Yueying, Gu Chenyi, Li Weisheng, Gu Zhengbin, Lun Yingzhuo, Shi Yi, Zhou Jian, Hong Jiawang, Wang Xinran, Wu Di, Nie Yuefeng

机构信息

National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, Nanjing University, Nanjing, P. R. China.

Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, P. R. China.

出版信息

Nat Commun. 2024 Oct 28;15(1):9281. doi: 10.1038/s41467-024-53436-6.

Abstract

Van der Waals integration of freestanding perovskite-oxide membranes with two-dimensional semiconductors has emerged as a promising strategy for developing high-performance electronics, such as field-effect transistors. In these innovative field-effect transistors, the oxide membranes have primarily functioned as dielectric layers, yet their great potential for structural tunability remains largely untapped. Free of epitaxial constraints by the substrate, these freestanding membranes exhibit remarkable structural tunability, providing a unique material system to achieve huge strain gradients and pronounced flexoelectric effects. Here, by harnessing the excellent structural tunability of PbTiO membranes and modulating the underlying substrate's elasticity, we demonstrate the tip-pressure-induced polarization switching with an ultralow pressure (down to 0.06 GPa). Moreover, as an application demonstration, we develop a prototype non-volatile ferroelectric field-effect transistor integrated on silicon that can be operated mechanically and electrically. Our findings underscore the great potential of oxide membranes for utilization in advanced non-volatile electronics and highly sensitive pressure sensors.

摘要

将独立的钙钛矿氧化物膜与二维半导体进行范德华集成,已成为开发高性能电子器件(如场效应晶体管)的一种很有前景的策略。在这些创新的场效应晶体管中,氧化物膜主要用作介电层,但其在结构可调性方面的巨大潜力在很大程度上仍未得到开发。这些独立的膜不受衬底的外延约束,表现出显著的结构可调性,提供了一个独特的材料体系来实现巨大的应变梯度和明显的挠曲电效应。在这里,通过利用PbTiO膜优异的结构可调性并调节底层衬底的弹性,我们展示了在超低压(低至0.06 GPa)下尖端压力诱导的极化切换。此外,作为应用演示,我们开发了一种集成在硅上的原型非易失性铁电场效应晶体管,它可以进行机械和电操作。我们的研究结果强调了氧化物膜在先进非易失性电子器件和高灵敏度压力传感器中的巨大应用潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6be4/11519889/bd00c9abe625/41467_2024_53436_Fig1_HTML.jpg

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