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用于高响应度和高速应用的具有悬浮结构的氧化镓日盲深紫外光电探测器。

GaO Solar-Blind Deep-Ultraviolet Photodetectors with a Suspended Structure for High Responsivity and High-Speed Applications.

作者信息

Li Xiaoxi, Wu Zhifan, Fang Yuan, Huang Shuqi, Fang Cizhe, Wang Yibo, Zeng Xiangyu, Yang Yingguo, Hao Yue, Liu Yan, Han Genquan

机构信息

Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China.

School of Microelectronics, Xidian University, Xi'an 710071, China.

出版信息

Research (Wash D C). 2024 Dec 11;7:0546. doi: 10.34133/research.0546. eCollection 2024.

Abstract

The wide-bandgap semiconductor material GaO exhibits great potential in solar-blind deep-ultraviolet (DUV) photodetection applications, including none-line-of-sight secure optical communication, fire warning, high-voltage electricity monitoring, and maritime fog dispersion navigation. However, GaO photodetectors have traditionally faced challenges in achieving both high responsivity and fast response time, limiting their practical application. Herein, the GaO solar-blind DUV photodetectors with a suspended structure have been constructed for the first time. The photodetector exhibits a high responsivity of 1.51 × 10 A/W, a sensitive detectivity of 6.01 × 10 Jones, a large external quantum efficiency of 7.53 × 10 %, and a fast rise time of 180 ms under 250-nm illumination. Notably, the photodetector achieves both high responsivity and fast response time simultaneously under ultra-weak power intensity excitation of 0.01 μW/cm. This important improvement is attributed to the reduction of interface defects, improved carrier transport, efficient carrier separation, and enhanced light absorption enabled by the suspended structure. This work provides valuable insights for designing and optimizing high-performance GaO solar-blind photodetectors.

摘要

宽带隙半导体材料氧化镓(GaO)在日盲深紫外(DUV)光电探测应用中展现出巨大潜力,这些应用包括非视距安全光通信、火灾预警、高压电监测以及海上雾中散射导航。然而,传统上氧化镓光电探测器在实现高响应度和快速响应时间方面面临挑战,这限制了它们的实际应用。在此,首次构建了具有悬浮结构的氧化镓日盲深紫外光电探测器。该光电探测器在250纳米光照下表现出1.51×10 A/W的高响应度、6.01×10琼斯的灵敏探测率、7.53×10%的大外量子效率以及180毫秒的快速上升时间。值得注意的是,该光电探测器在0.01 μW/cm的超弱功率强度激发下同时实现了高响应度和快速响应时间。这一重要改进归因于界面缺陷的减少、载流子传输的改善、载流子的有效分离以及悬浮结构实现的光吸收增强。这项工作为设计和优化高性能氧化镓日盲光电探测器提供了有价值的见解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0f4c/11632154/9449985894e8/research.0546.fig.001.jpg

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