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通过用胶体量子点修饰介电-半导体界面提高铟锡氧化锌薄膜晶体管的性能

Performance enhancement of InSnZnO thin-film transistors by modifying the dielectric-semiconductor interface with colloidal quantum dots.

作者信息

Chen Sijie, Chen Haoran, Xia Chenghui, Sun Zhenhua

机构信息

Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, State Key Laboratory of Radio Frequency Heterogeneous Integration, College of Physics and Optoelectronic Engineering, Shenzhen University Shenzhen 518060 China

School of Materials Science and Engineering, Ocean University of China Qingdao Shandong 266404 China

出版信息

Nanoscale Adv. 2024 Dec 27;7(5):1300-1304. doi: 10.1039/d4na00967c. eCollection 2025 Feb 25.

Abstract

Thin film transistors (TFTs) with InSnZnO (ITZO) and AlO as the semiconductor and dielectric layers, respectively, were investigated, aiming to elevate the device performance. Chemically synthesized CuInS/ZnS core/shell colloidal quantum dots (QDs) were used to passivate the semiconductor/dielectric interface. Compared with the pristine device, the device with the integrated QDs demonstrates remarkably improved electrical performance, including a higher electron mobility and a lower leakage current. Moreover, the integration of QDs largely mitigates hysteresis in the bidirectional transfer characteristics of the device. Improved negative bias stress stability is also observed in the device with QDs. The performance enhancement is ascribed to the reduction of the trap states induced by the defects in AlO, and the screening of electrical dipoles at the AlO/ITZO interface. This work proposes a new strategy to passivate the semiconductor/dielectric interface, which not only improves TFT performance, but also holds potential for optoelectronic applications.

摘要

分别以铟锡氧化锌(ITZO)和氧化铝(AlO)作为半导体层和介电层的薄膜晶体管(TFT)被加以研究,目的是提升器件性能。采用化学合成的硫化铜铟/硫化锌核壳胶体量子点(QD)对半导体/介电界面进行钝化。与原始器件相比,集成量子点的器件展现出显著改善的电学性能,包括更高的电子迁移率和更低的漏电流。此外,量子点的集成在很大程度上减轻了器件双向传输特性中的滞后现象。在带有量子点的器件中还观察到负偏压应力稳定性得到改善。性能的提升归因于氧化铝中缺陷所诱导的陷阱态的减少,以及氧化铝/铟锡氧化锌界面处电偶极子的屏蔽。这项工作提出了一种钝化半导体/介电界面的新策略,该策略不仅提高了薄膜晶体管的性能,而且在光电子应用方面也具有潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a708/11854264/38fe31f16ef5/d4na00967c-f1.jpg

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