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解决氧化物薄膜晶体管中迁移率和稳定性之间的冲突。

Addressing the Conflict between Mobility and Stability in Oxide Thin-film Transistors.

机构信息

Laboratory of Advanced Nano Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, P. R. China.

State Key Lab of Opto-Electronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, 510275, P. R. China.

出版信息

Adv Sci (Weinh). 2023 May;10(14):e2300373. doi: 10.1002/advs.202300373. Epub 2023 Mar 19.

Abstract

Amorphous oxide semiconductor thin-film transistors (AOS TFTs) are ever-increasingly utilized in displays. However, to bring high mobility and excellent stability together is a daunting challenge. Here, the carrier transport/relaxation bilayer stacked AOS TFTs are investigated to solve the mobility-stability conflict. The charge transport layer (CTL) is made of amorphous In-rich InSnZnO, which favors big average effective coordination number for all cations and more edge-shared structures for better charge transport. Praseodymium-doped InSnZnO is used as the charge relaxation layer (CRL), which substantially shortens the photoelectron lifetime as revealed by femtosecond transient absorption spectroscopy. The CTL and CRL with the thickness suitable for industrial production respectively afford minute potential barrier fluctuation for charge transport and fast relaxation for photo-generated carriers, resulting in transistors with an ultrahigh mobility (75.5 cm V s ) and small negative-bias-illumination-stress/positive-bias-temperature-stress voltage shifts (-1.64/0.76 V). The design concept provides a promising route to address the mobility-stability conflict for high-end displays.

摘要

非晶态氧化物半导体薄膜晶体管(AOS TFT)在显示器中的应用越来越广泛。然而,要实现高迁移率和优异的稳定性是一个艰巨的挑战。在这里,我们研究了载流子输运/弛豫双层堆叠 AOS TFT,以解决迁移率-稳定性的冲突。电荷输运层(CTL)由富铟的非晶 InSnZnO 制成,有利于所有阳离子的平均有效配位数较大和更多的边共享结构,从而实现更好的电荷输运。掺镨的 InSnZnO 用作电荷弛豫层(CRL),飞秒瞬态吸收光谱表明其显著缩短了光电子寿命。适合工业生产的 CTL 和 CRL 分别为电荷输运提供微小的势垒波动和光生载流子的快速弛豫,从而使晶体管具有超高的迁移率(75.5 cm V s )和较小的负偏压光照/正偏温电压漂移(-1.64/0.76 V)。该设计理念为解决高端显示器的迁移率-稳定性冲突提供了一条有前途的途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ab47/10190610/fe97dc2e8121/ADVS-10-2300373-g005.jpg

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